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- W2904602294 abstract "A comparative study was carried out of the structure and reflection performance of four types of multilayer mirror for extreme ultraviolet lithography at 11.2 nm; these were a pure Mo/Be structure and three Mo/Be-based structures with thin B4C, C and Si interlayers. It was demonstrated that Mo/Be mirrors show maximum reflectance at normal incidence, while maximum structural perfection is shown by Mo/Be/Si mirrors. The introduction of B4C and C layers into the structure increases the interlayer roughness and reduces the sharpness of the interfaces, adversely affecting the target coating characteristics. Results are presented for studies using four techniques: X-ray reflectometry, small-angle X-ray scattering, atomic force microscopy, and transmission electron microscopy." @default.
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- W2904602294 date "2018-12-12" @default.
- W2904602294 modified "2023-10-11" @default.
- W2904602294 title "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
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- W2904602294 doi "https://doi.org/10.1364/oe.26.033718" @default.
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