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- W2904607989 abstract "In recent years, thin-film piezoelectric-on-silicon (TPoS) bulk acoustic wave resonator-based technology provides an attractive applied vision of high-precision sensors, timing references and radio frequency (RF) band-pass filters. However, it is still comparatively difficult to realize high-quality factor (Q) and multiple-frequency simultaneously. In this paper, a novel interdigital electrodes structure aims to counterpoise distribution of surface charge density was proposed and proved by finite-element-analysis (FEA) simulation and experimental comparison in multiple-frequency ring-shaped TPoS resonators. The maximum unloaded quality factor $pmb{(mathcal{Q}_{u})}$ of the resonator with interdigital electrodes achieved approximately 10000 at 83.6 MHz which showed a 4-fold enhancement compared with the pristine one." @default.
- W2904607989 created "2018-12-22" @default.
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- W2904607989 date "2018-05-01" @default.
- W2904607989 modified "2023-10-02" @default.
- W2904607989 title "High-Q Multiple-Frequency Ring-Shaped Thin-Film Piezoelectric-on-Silicon Resonators" @default.
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- W2904607989 doi "https://doi.org/10.1109/icmmt.2018.8563655" @default.
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