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- W2904654534 abstract "This paper presents a high-precision magnetic levitation system with six degrees of freedom (6-DoF) required for many high technology areas such as semiconductor industry or nanotechnology. It is characterized by a very simple compact construction with a relatively low-power consumption of the magnetic guidance. Furthermore, it provides a freely accessible mover from above with decoupled levitation and propulsion forces. In order to determine the forces, acting on the moving permanent magnet, semi-analytical force equations will be derived. The calculated forces determined by the equations and the verification by 3D-FEM are presented in this paper as well." @default.
- W2904654534 created "2018-12-22" @default.
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- W2904654534 date "2018-09-01" @default.
- W2904654534 modified "2023-09-30" @default.
- W2904654534 title "Research on a 6-DoF Magnetic Levitation System" @default.
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- W2904654534 doi "https://doi.org/10.1109/upec.2018.8541883" @default.
- W2904654534 hasPublicationYear "2018" @default.
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