Matches in SemOpenAlex for { <https://semopenalex.org/work/W2905059818> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2905059818 abstract "This proposes a novel structure of power converter solution on the basis of current source type topology for a highly capacitively-coupled plasma application system. In overall system, two current sources are connected in parallel to generate the different output current of high precision in different switching intervals. The overall system consists of four major functional blocks; bias current generator, bias current modulator, slope current generator, and slope current modulator. The proposed solution also employs SiC MOSFET type power semiconductor switch of 1200V/90A in order to meet the fast transient requirement. The proposed converter system successfully satisfies the specification of output voltage of 4.5kV and output current of 40A with the rising/falling time of less than 100ns. This proposed topology makes it possible to accurately shape the output load voltage in a highly capacitively-coupled plasma application system with reduced level of voltage spike and distortion as compared to the state-of-the-arts solutions of voltage source type converters." @default.
- W2905059818 created "2018-12-22" @default.
- W2905059818 creator A5002114878 @default.
- W2905059818 creator A5008640196 @default.
- W2905059818 creator A5018885539 @default.
- W2905059818 creator A5039271899 @default.
- W2905059818 creator A5055074817 @default.
- W2905059818 date "2018-09-01" @default.
- W2905059818 modified "2023-09-26" @default.
- W2905059818 title "Pulse Current Generator with Improved Waveform Fidelity for High Voltage Capacitively-Coupled Plasma System" @default.
- W2905059818 cites W1884485657 @default.
- W2905059818 cites W2102583684 @default.
- W2905059818 cites W2102905792 @default.
- W2905059818 cites W2156901032 @default.
- W2905059818 cites W2161445809 @default.
- W2905059818 cites W2312253326 @default.
- W2905059818 cites W2322099538 @default.
- W2905059818 cites W2331295713 @default.
- W2905059818 cites W2737996373 @default.
- W2905059818 cites W2752927671 @default.
- W2905059818 doi "https://doi.org/10.1109/ecce.2018.8558425" @default.
- W2905059818 hasPublicationYear "2018" @default.
- W2905059818 type Work @default.
- W2905059818 sameAs 2905059818 @default.
- W2905059818 citedByCount "2" @default.
- W2905059818 countsByYear W29050598182020 @default.
- W2905059818 countsByYear W29050598182023 @default.
- W2905059818 crossrefType "proceedings-article" @default.
- W2905059818 hasAuthorship W2905059818A5002114878 @default.
- W2905059818 hasAuthorship W2905059818A5008640196 @default.
- W2905059818 hasAuthorship W2905059818A5018885539 @default.
- W2905059818 hasAuthorship W2905059818A5039271899 @default.
- W2905059818 hasAuthorship W2905059818A5055074817 @default.
- W2905059818 hasConcept C119599485 @default.
- W2905059818 hasConcept C121332964 @default.
- W2905059818 hasConcept C127413603 @default.
- W2905059818 hasConcept C144655898 @default.
- W2905059818 hasConcept C163258240 @default.
- W2905059818 hasConcept C165801399 @default.
- W2905059818 hasConcept C184720557 @default.
- W2905059818 hasConcept C197424946 @default.
- W2905059818 hasConcept C24326235 @default.
- W2905059818 hasConcept C2778422915 @default.
- W2905059818 hasConcept C2780992000 @default.
- W2905059818 hasConcept C2781331714 @default.
- W2905059818 hasConcept C41008148 @default.
- W2905059818 hasConcept C51319974 @default.
- W2905059818 hasConcept C62520636 @default.
- W2905059818 hasConceptScore W2905059818C119599485 @default.
- W2905059818 hasConceptScore W2905059818C121332964 @default.
- W2905059818 hasConceptScore W2905059818C127413603 @default.
- W2905059818 hasConceptScore W2905059818C144655898 @default.
- W2905059818 hasConceptScore W2905059818C163258240 @default.
- W2905059818 hasConceptScore W2905059818C165801399 @default.
- W2905059818 hasConceptScore W2905059818C184720557 @default.
- W2905059818 hasConceptScore W2905059818C197424946 @default.
- W2905059818 hasConceptScore W2905059818C24326235 @default.
- W2905059818 hasConceptScore W2905059818C2778422915 @default.
- W2905059818 hasConceptScore W2905059818C2780992000 @default.
- W2905059818 hasConceptScore W2905059818C2781331714 @default.
- W2905059818 hasConceptScore W2905059818C41008148 @default.
- W2905059818 hasConceptScore W2905059818C51319974 @default.
- W2905059818 hasConceptScore W2905059818C62520636 @default.
- W2905059818 hasLocation W29050598181 @default.
- W2905059818 hasOpenAccess W2905059818 @default.
- W2905059818 hasPrimaryLocation W29050598181 @default.
- W2905059818 hasRelatedWork W1485489678 @default.
- W2905059818 hasRelatedWork W1546916369 @default.
- W2905059818 hasRelatedWork W1950111875 @default.
- W2905059818 hasRelatedWork W2051351283 @default.
- W2905059818 hasRelatedWork W2065522876 @default.
- W2905059818 hasRelatedWork W2078709612 @default.
- W2905059818 hasRelatedWork W2122512407 @default.
- W2905059818 hasRelatedWork W2165219865 @default.
- W2905059818 hasRelatedWork W2382335154 @default.
- W2905059818 hasRelatedWork W3009482846 @default.
- W2905059818 isParatext "false" @default.
- W2905059818 isRetracted "false" @default.
- W2905059818 magId "2905059818" @default.
- W2905059818 workType "article" @default.