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- W2905209012 abstract "This paper reports an integrated forward-view 2-axis MEMS scanner that enables ultrasmall 3D LiDAR for applications in micro-air vehicles (MAV). A new design of a pair of vertically-oriented 2-axis scanning MEMS scanner is proposed and fabricated using an innovative fabrication process. Such MEMS scanners are integrated on a silicon optical bench and bent vertically to the substrate, thus forward scan is realized without any beam-folding mirrors. The mirror plate is $mathbf{0.7 mm}times mathbf{0.7}$ mm. The measured optical scan range reaches 17° in both axes at only 4.5 V. The measured resonance frequency of the angular scanning mode is 2.2 kHz. Good optical alignment for LiDAR scanners can be achieved without extra alignment efforts. This MEMS mirror allows a forward-view LiDAR scanner to be monolithically integrated and aligned on a single chip." @default.
- W2905209012 created "2018-12-22" @default.
- W2905209012 creator A5003054184 @default.
- W2905209012 creator A5012264636 @default.
- W2905209012 creator A5026793138 @default.
- W2905209012 creator A5027458220 @default.
- W2905209012 creator A5048981690 @default.
- W2905209012 creator A5061139563 @default.
- W2905209012 date "2018-04-01" @default.
- W2905209012 modified "2023-10-01" @default.
- W2905209012 title "An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar" @default.
- W2905209012 cites W1518672027 @default.
- W2905209012 cites W1978564507 @default.
- W2905209012 cites W2028748849 @default.
- W2905209012 cites W2035155402 @default.
- W2905209012 cites W2073192879 @default.
- W2905209012 cites W2133388740 @default.
- W2905209012 cites W2359325413 @default.
- W2905209012 cites W2373132334 @default.
- W2905209012 cites W2391822901 @default.
- W2905209012 doi "https://doi.org/10.1109/nems.2018.8557009" @default.
- W2905209012 hasPublicationYear "2018" @default.
- W2905209012 type Work @default.
- W2905209012 sameAs 2905209012 @default.
- W2905209012 citedByCount "4" @default.
- W2905209012 countsByYear W29052090122018 @default.
- W2905209012 countsByYear W29052090122020 @default.
- W2905209012 countsByYear W29052090122021 @default.
- W2905209012 crossrefType "proceedings-article" @default.
- W2905209012 hasAuthorship W2905209012A5003054184 @default.
- W2905209012 hasAuthorship W2905209012A5012264636 @default.
- W2905209012 hasAuthorship W2905209012A5026793138 @default.
- W2905209012 hasAuthorship W2905209012A5027458220 @default.
- W2905209012 hasAuthorship W2905209012A5048981690 @default.
- W2905209012 hasAuthorship W2905209012A5061139563 @default.
- W2905209012 hasConcept C120665830 @default.
- W2905209012 hasConcept C121332964 @default.
- W2905209012 hasConcept C136525101 @default.
- W2905209012 hasConcept C141349535 @default.
- W2905209012 hasConcept C142724271 @default.
- W2905209012 hasConcept C192562407 @default.
- W2905209012 hasConcept C204787440 @default.
- W2905209012 hasConcept C2779751349 @default.
- W2905209012 hasConcept C37977207 @default.
- W2905209012 hasConcept C49040817 @default.
- W2905209012 hasConcept C51399673 @default.
- W2905209012 hasConcept C520434653 @default.
- W2905209012 hasConcept C71924100 @default.
- W2905209012 hasConceptScore W2905209012C120665830 @default.
- W2905209012 hasConceptScore W2905209012C121332964 @default.
- W2905209012 hasConceptScore W2905209012C136525101 @default.
- W2905209012 hasConceptScore W2905209012C141349535 @default.
- W2905209012 hasConceptScore W2905209012C142724271 @default.
- W2905209012 hasConceptScore W2905209012C192562407 @default.
- W2905209012 hasConceptScore W2905209012C204787440 @default.
- W2905209012 hasConceptScore W2905209012C2779751349 @default.
- W2905209012 hasConceptScore W2905209012C37977207 @default.
- W2905209012 hasConceptScore W2905209012C49040817 @default.
- W2905209012 hasConceptScore W2905209012C51399673 @default.
- W2905209012 hasConceptScore W2905209012C520434653 @default.
- W2905209012 hasConceptScore W2905209012C71924100 @default.
- W2905209012 hasLocation W29052090121 @default.
- W2905209012 hasOpenAccess W2905209012 @default.
- W2905209012 hasPrimaryLocation W29052090121 @default.
- W2905209012 hasRelatedWork W1581747914 @default.
- W2905209012 hasRelatedWork W162865946 @default.
- W2905209012 hasRelatedWork W1964228049 @default.
- W2905209012 hasRelatedWork W2090542780 @default.
- W2905209012 hasRelatedWork W2154926251 @default.
- W2905209012 hasRelatedWork W2334015781 @default.
- W2905209012 hasRelatedWork W2913318368 @default.
- W2905209012 hasRelatedWork W2969850555 @default.
- W2905209012 hasRelatedWork W2995383467 @default.
- W2905209012 hasRelatedWork W2995819682 @default.
- W2905209012 hasRelatedWork W3006766612 @default.
- W2905209012 hasRelatedWork W3110493259 @default.
- W2905209012 hasRelatedWork W3138991350 @default.
- W2905209012 hasRelatedWork W3194182568 @default.
- W2905209012 hasRelatedWork W83423707 @default.
- W2905209012 hasRelatedWork W1968833484 @default.
- W2905209012 hasRelatedWork W2725620701 @default.
- W2905209012 hasRelatedWork W2911131220 @default.
- W2905209012 hasRelatedWork W3090871229 @default.
- W2905209012 hasRelatedWork W3091450157 @default.
- W2905209012 isParatext "false" @default.
- W2905209012 isRetracted "false" @default.
- W2905209012 magId "2905209012" @default.
- W2905209012 workType "article" @default.