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• W2905551702 abstract "Secondary ion mass spectrometry (SIMS) is a well-known technique for 3D chemical mapping at the nanoscale, with detection sensitivity in the range of ppm or even ppb. Energy dispersive X-ray spectroscopy (EDS) is the standard chemical analysis and imaging technique in modern scanning electron microscopes (SEM), and related dual-beam focussed ion beam (FIBSEM) instruments. Contrary to the use of an electron beam, in the past the ion beam in FIBSEMs has predominantly been used for local milling or deposition of material. Here, we review the emerging FIBSIMS technique which exploits the focused ion beam as an analytical probe, providing the capability to perform secondary ion mass spectrometry measurements on FIBSEM instruments: secondary ions, sputtered by the FIB, are collected and selected according to their mass by a mass spectrometer. In this way a complete 3D chemical analysis with high lateral resolution < 50 nm and a depth resolution < 10 nm is attainable. We first report on the historical developments of both SIMS and FIB techniques and review recent developments in both instruments. We then review the physics of interaction for incident particles using Monte Carlo simulations. Next, the components of modern FIBSIMS instruments, from the primary ion generation in the liquid metal source in the FIB column, the focussing optics, the sputtered ion extraction optics, to the different mass spectrometer types are all detailed. The advantages and disadvantages of parallel and serial mass selection in terms of data acquisition and interpretation are highlighted, while the effects of pressure in the FIBSEM, acceleration voltage, ion take-off angles and charge compensation techniques on the analysis results are then discussed. The capabilities of FIBSIMS in terms of sensitivity, lateral and depth resolution and mass resolution are reviewed. Different data acquisition strategies related to dwell time, binning and beam control strategies as well as roughness and edge effects are discussed. Data analysis routines for mass identification based on isotope ratios and molecular fragments are outlined. Application examples are then presented for the fields of thin films, polycrystalline metals, batteries, cultural heritage materials, isotope labelling, and geological materials. Finally, FIBSIMS is compared to EDS, and the potential of the technique for correlative microscopy with other FIBSEM based imaging techniques is discussed." @default.
• W2905551702 created "2018-12-22" @default.
• W2905551702 creator A5068768702 @default.
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• W2905551702 date "2019-02-01" @default.
• W2905551702 modified "2023-10-16" @default.
• W2905551702 title "FIBSIMS: A review of secondary ion mass spectrometry for analytical dual beam focussed ion beam instruments" @default.
• W2905551702 cites W1627200602 @default.
• W2905551702 cites W1963662926 @default.
• W2905551702 cites W1966118057 @default.
• W2905551702 cites W1967549255 @default.
• W2905551702 cites W1968540490 @default.
• W2905551702 cites W1968702923 @default.
• W2905551702 cites W1971706423 @default.
• W2905551702 cites W1971833872 @default.
• W2905551702 cites W1973381743 @default.
• W2905551702 cites W1974937922 @default.
• W2905551702 cites W1981686690 @default.
• W2905551702 cites W1982381330 @default.
• W2905551702 cites W1982794162 @default.
• W2905551702 cites W1987910133 @default.
• W2905551702 cites W1988108481 @default.
• W2905551702 cites W1994036271 @default.
• W2905551702 cites W1994408645 @default.
• W2905551702 cites W1995474718 @default.
• W2905551702 cites W1997669905 @default.
• W2905551702 cites W1997994730 @default.
• W2905551702 cites W2004640617 @default.
• W2905551702 cites W2014298488 @default.
• W2905551702 cites W2015475243 @default.
• W2905551702 cites W2018238822 @default.
• W2905551702 cites W2019708504 @default.
• W2905551702 cites W2020764316 @default.
• W2905551702 cites W2022655779 @default.
• W2905551702 cites W2039735030 @default.
• W2905551702 cites W2042861858 @default.
• W2905551702 cites W2059258081 @default.
• W2905551702 cites W2061712222 @default.
• W2905551702 cites W2064032645 @default.
• W2905551702 cites W2067740897 @default.
• W2905551702 cites W2071620103 @default.
• W2905551702 cites W2073323755 @default.
• W2905551702 cites W2074168379 @default.
• W2905551702 cites W2080432917 @default.
• W2905551702 cites W2084525137 @default.
• W2905551702 cites W2085285825 @default.
• W2905551702 cites W2085295334 @default.
• W2905551702 cites W2087771968 @default.
• W2905551702 cites W2094705840 @default.
• W2905551702 cites W2095405590 @default.
• W2905551702 cites W2096044183 @default.
• W2905551702 cites W2103011196 @default.
• W2905551702 cites W2109546725 @default.
• W2905551702 cites W2120160959 @default.
• W2905551702 cites W2132985166 @default.
• W2905551702 cites W2134305838 @default.
• W2905551702 cites W2138008808 @default.
• W2905551702 cites W2151253085 @default.
• W2905551702 cites W2156952714 @default.
• W2905551702 cites W2213975049 @default.
• W2905551702 cites W2263669478 @default.
• W2905551702 cites W2313072411 @default.
• W2905551702 cites W2318474648 @default.
• W2905551702 cites W2324456386 @default.
• W2905551702 cites W2532341048 @default.
• W2905551702 cites W2560295488 @default.
• W2905551702 cites W3102292015 @default.
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• W2905551702 doi "https://doi.org/10.1016/j.pcrysgrow.2018.10.001" @default.
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