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- W290622010 abstract "The authors report the growth kinetics of GaN thin films using the single source precursor bisazido dimethylaminopropyl gallium (BAZIGA) in a cold wall reactor. Transparent, smooth, epitaxial (FWHM of the {alpha}-GaN 0002 rocking curve = 129.6 arcsec) and stoichiometric GaN films were grown on c-plane Al{sub 2}O{sub 3} substrates in the temperature range of 870--1,320 K and high growth rates were obtained (up to 4,000 nm/hr). Film growth was studied as a function of substrate temperature as well as reactor pressure. Although high quality films were obtained without using any additional source of nitrogen such as ammonia, the authors have investigated the effect of ammonia on the growth and properties of the resulting films. The films obtained were characterized by XRD, RBS, XPS, AES, AFM, SEM and the room temperature PL spectroscopy of GaN films grown exhibited the correct near band edge luminescence at 3.45 eV." @default.
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- W290622010 date "2000-07-01" @default.
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- W290622010 title "Growth kinetics of GaN thin films grown by OMVPE using single source precursors[Organometallic Vapor Phase Epitaxy]" @default.
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