FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2906870449> ?p ?o ?g. }

• W2906870449 endingPage "010906" @default.
• W2906870449 startingPage "010906" @default.
• W2906870449 abstract "The authors report on the properties of various conductive nitride (TiN, ZrN, and TaN) films prepared by plasma enhanced atomic layer deposition using either quartz or sapphire inductively coupled plasma (ICP) sources. Different reactive gases (N2, NH3, and H2) and various pressures during the plasma half-cycle were examined. The sapphire based ICP source enabled higher deposition rates, better crystallization, lower film resistivity, and lower oxygen contamination. The effect of the ICP source material depends strongly on the reactive gas species and pressure. Optimal deposition conditions for both ICP source materials are determined.The authors report on the properties of various conductive nitride (TiN, ZrN, and TaN) films prepared by plasma enhanced atomic layer deposition using either quartz or sapphire inductively coupled plasma (ICP) sources. Different reactive gases (N2, NH3, and H2) and various pressures during the plasma half-cycle were examined. The sapphire based ICP source enabled higher deposition rates, better crystallization, lower film resistivity, and lower oxygen contamination. The effect of the ICP source material depends strongly on the reactive gas species and pressure. Optimal deposition conditions for both ICP source materials are determined." @default.
• W2906870449 created "2019-01-11" @default.
• W2906870449 creator A5006073913 @default.
• W2906870449 creator A5023529199 @default.
• W2906870449 creator A5027846054 @default.
• W2906870449 creator A5043406231 @default.
• W2906870449 creator A5070158486 @default.
• W2906870449 creator A5084209185 @default.
• W2906870449 date "2019-01-01" @default.
• W2906870449 modified "2023-10-16" @default.
• W2906870449 title "Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources" @default.
• W2906870449 cites W1915157968 @default.
• W2906870449 cites W1966792585 @default.
• W2906870449 cites W1986410144 @default.
• W2906870449 cites W2023790037 @default.
• W2906870449 cites W2035931858 @default.
• W2906870449 cites W2044108992 @default.
• W2906870449 cites W2053784345 @default.
• W2906870449 cites W2061930543 @default.
• W2906870449 cites W2074905782 @default.
• W2906870449 cites W2149248689 @default.
• W2906870449 cites W2154824307 @default.
• W2906870449 cites W2493880907 @default.
• W2906870449 cites W2625444524 @default.
• W2906870449 cites W2884653063 @default.
• W2906870449 cites W2901360230 @default.
• W2906870449 doi "https://doi.org/10.1116/1.5075491" @default.
• W2906870449 hasPublicationYear "2019" @default.
• W2906870449 type Work @default.
• W2906870449 sameAs 2906870449 @default.
• W2906870449 citedByCount "12" @default.
• W2906870449 countsByYear W29068704492019 @default.
• W2906870449 countsByYear W29068704492020 @default.
• W2906870449 countsByYear W29068704492021 @default.
• W2906870449 countsByYear W29068704492022 @default.
• W2906870449 countsByYear W29068704492023 @default.
• W2906870449 crossrefType "journal-article" @default.
• W2906870449 hasAuthorship W2906870449A5006073913 @default.
• W2906870449 hasAuthorship W2906870449A5023529199 @default.
• W2906870449 hasAuthorship W2906870449A5027846054 @default.
• W2906870449 hasAuthorship W2906870449A5043406231 @default.
• W2906870449 hasAuthorship W2906870449A5070158486 @default.
• W2906870449 hasAuthorship W2906870449A5084209185 @default.
• W2906870449 hasConcept C120665830 @default.
• W2906870449 hasConcept C121332964 @default.
• W2906870449 hasConcept C127313418 @default.
• W2906870449 hasConcept C151730666 @default.
• W2906870449 hasConcept C159985019 @default.
• W2906870449 hasConcept C171250308 @default.
• W2906870449 hasConcept C192562407 @default.
• W2906870449 hasConcept C194760766 @default.
• W2906870449 hasConcept C202374169 @default.
• W2906870449 hasConcept C2779227376 @default.
• W2906870449 hasConcept C2779870107 @default.
• W2906870449 hasConcept C2780064504 @default.
• W2906870449 hasConcept C2816523 @default.
• W2906870449 hasConcept C49040817 @default.
• W2906870449 hasConcept C520434653 @default.
• W2906870449 hasConcept C62520636 @default.
• W2906870449 hasConcept C64297162 @default.
• W2906870449 hasConcept C69544855 @default.
• W2906870449 hasConcept C82706917 @default.
• W2906870449 hasConceptScore W2906870449C120665830 @default.
• W2906870449 hasConceptScore W2906870449C121332964 @default.
• W2906870449 hasConceptScore W2906870449C127313418 @default.
• W2906870449 hasConceptScore W2906870449C151730666 @default.
• W2906870449 hasConceptScore W2906870449C159985019 @default.
• W2906870449 hasConceptScore W2906870449C171250308 @default.
• W2906870449 hasConceptScore W2906870449C192562407 @default.
• W2906870449 hasConceptScore W2906870449C194760766 @default.
• W2906870449 hasConceptScore W2906870449C202374169 @default.
• W2906870449 hasConceptScore W2906870449C2779227376 @default.
• W2906870449 hasConceptScore W2906870449C2779870107 @default.
• W2906870449 hasConceptScore W2906870449C2780064504 @default.
• W2906870449 hasConceptScore W2906870449C2816523 @default.
• W2906870449 hasConceptScore W2906870449C49040817 @default.
• W2906870449 hasConceptScore W2906870449C520434653 @default.
• W2906870449 hasConceptScore W2906870449C62520636 @default.
• W2906870449 hasConceptScore W2906870449C64297162 @default.
• W2906870449 hasConceptScore W2906870449C69544855 @default.
• W2906870449 hasConceptScore W2906870449C82706917 @default.
• W2906870449 hasFunder F4320320948 @default.
• W2906870449 hasIssue "1" @default.
• W2906870449 hasLocation W29068704491 @default.
• W2906870449 hasOpenAccess W2906870449 @default.
• W2906870449 hasPrimaryLocation W29068704491 @default.
• W2906870449 hasRelatedWork W1536954090 @default.
• W2906870449 hasRelatedWork W2139442112 @default.
• W2906870449 hasRelatedWork W2139871202 @default.
• W2906870449 hasRelatedWork W2330136148 @default.
• W2906870449 hasRelatedWork W2898050266 @default.
• W2906870449 hasRelatedWork W2910258616 @default.
• W2906870449 hasRelatedWork W2945410793 @default.
• W2906870449 hasRelatedWork W2949072884 @default.
• W2906870449 hasRelatedWork W3175146547 @default.
• W2906870449 hasRelatedWork W4236275941 @default.
• W2906870449 hasVolume "37" @default.
• W2906870449 isParatext "false" @default.

• next