Matches in SemOpenAlex for { <https://semopenalex.org/work/W2907174929> ?p ?o ?g. }
- W2907174929 endingPage "011805" @default.
- W2907174929 startingPage "011805" @default.
- W2907174929 abstract "Halide vapor phase epitaxy (HVPE) is widely used in the semiconductor industry for the growth of Si, GaAs, GaN, etc. HVPE is a non-organic chemical vapor deposition (CVD) technique, characterized by high quality growth of epitaxial layers with fast growth rate, which is versatile for the fabrication of both substrates and devices with wide applications. In this paper, we review the usage of HVPE for the growth and device applications of Ga2O3, with detailed discussions on a variety of technological aspects of HVPE. It is concluded that HVPE is a promising candidate for the epitaxy of large-area Ga2O3 substrates and for the fabrication of high power β-Ga2O3 devices." @default.
- W2907174929 created "2019-01-11" @default.
- W2907174929 creator A5024176882 @default.
- W2907174929 creator A5029627390 @default.
- W2907174929 creator A5064014162 @default.
- W2907174929 creator A5070171613 @default.
- W2907174929 creator A5076474038 @default.
- W2907174929 creator A5083967189 @default.
- W2907174929 date "2019-01-01" @default.
- W2907174929 modified "2023-10-16" @default.
- W2907174929 title "Application of halide vapor phase epitaxy for the growth of ultra-wide band gap Ga<sub>2</sub>O<sub>3</sub>" @default.
- W2907174929 cites W126586751 @default.
- W2907174929 cites W1492977420 @default.
- W2907174929 cites W1537057828 @default.
- W2907174929 cites W1577912024 @default.
- W2907174929 cites W1612908971 @default.
- W2907174929 cites W1670023571 @default.
- W2907174929 cites W1674257804 @default.
- W2907174929 cites W1965982998 @default.
- W2907174929 cites W1974850834 @default.
- W2907174929 cites W1976100621 @default.
- W2907174929 cites W1977400064 @default.
- W2907174929 cites W1981106976 @default.
- W2907174929 cites W1984871674 @default.
- W2907174929 cites W1988040766 @default.
- W2907174929 cites W1988564875 @default.
- W2907174929 cites W1990807725 @default.
- W2907174929 cites W1992295407 @default.
- W2907174929 cites W1993521697 @default.
- W2907174929 cites W1997235780 @default.
- W2907174929 cites W2006465672 @default.
- W2907174929 cites W2007780712 @default.
- W2907174929 cites W2013095619 @default.
- W2907174929 cites W2015842312 @default.
- W2907174929 cites W2017632405 @default.
- W2907174929 cites W2018693576 @default.
- W2907174929 cites W2020431932 @default.
- W2907174929 cites W2023357843 @default.
- W2907174929 cites W2027101237 @default.
- W2907174929 cites W2028844105 @default.
- W2907174929 cites W2044335565 @default.
- W2907174929 cites W2058920806 @default.
- W2907174929 cites W2061473868 @default.
- W2907174929 cites W2070759111 @default.
- W2907174929 cites W2070837727 @default.
- W2907174929 cites W2070946896 @default.
- W2907174929 cites W2071906365 @default.
- W2907174929 cites W2074536946 @default.
- W2907174929 cites W2074956526 @default.
- W2907174929 cites W2080656142 @default.
- W2907174929 cites W2087329469 @default.
- W2907174929 cites W2095638168 @default.
- W2907174929 cites W2259626724 @default.
- W2907174929 cites W2300845256 @default.
- W2907174929 cites W2325261197 @default.
- W2907174929 cites W2327609958 @default.
- W2907174929 cites W2522809841 @default.
- W2907174929 cites W2551166540 @default.
- W2907174929 cites W2594666775 @default.
- W2907174929 cites W2613561534 @default.
- W2907174929 cites W2686716614 @default.
- W2907174929 cites W2792723914 @default.
- W2907174929 cites W2800909491 @default.
- W2907174929 cites W2888461305 @default.
- W2907174929 cites W2892322037 @default.
- W2907174929 cites W2902299424 @default.
- W2907174929 cites W4206429359 @default.
- W2907174929 cites W4235911861 @default.
- W2907174929 doi "https://doi.org/10.1088/1674-4926/40/1/011805" @default.
- W2907174929 hasPublicationYear "2019" @default.
- W2907174929 type Work @default.
- W2907174929 sameAs 2907174929 @default.
- W2907174929 citedByCount "13" @default.
- W2907174929 countsByYear W29071749292019 @default.
- W2907174929 countsByYear W29071749292020 @default.
- W2907174929 countsByYear W29071749292021 @default.
- W2907174929 countsByYear W29071749292022 @default.
- W2907174929 countsByYear W29071749292023 @default.
- W2907174929 crossrefType "journal-article" @default.
- W2907174929 hasAuthorship W2907174929A5024176882 @default.
- W2907174929 hasAuthorship W2907174929A5029627390 @default.
- W2907174929 hasAuthorship W2907174929A5064014162 @default.
- W2907174929 hasAuthorship W2907174929A5070171613 @default.
- W2907174929 hasAuthorship W2907174929A5076474038 @default.
- W2907174929 hasAuthorship W2907174929A5083967189 @default.
- W2907174929 hasConcept C108225325 @default.
- W2907174929 hasConcept C110738630 @default.
- W2907174929 hasConcept C121332964 @default.
- W2907174929 hasConcept C136525101 @default.
- W2907174929 hasConcept C142724271 @default.
- W2907174929 hasConcept C171250308 @default.
- W2907174929 hasConcept C171560689 @default.
- W2907174929 hasConcept C179104552 @default.
- W2907174929 hasConcept C181966813 @default.
- W2907174929 hasConcept C185592680 @default.
- W2907174929 hasConcept C192562407 @default.
- W2907174929 hasConcept C204787440 @default.
- W2907174929 hasConcept C2779227376 @default.