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- W2907248403 abstract "In this paper the authors propose electrostatic multi-parameter measuring MEMS-transducer with shock excitation of a movable electrode. the multidimensional basis of output signals generated by a two-parameter measuring transducer under conditions of shock excitation of voltage-controlled movable MEMS-electrodes in electrostatic capacitor has been constructed. The peculiar features of a two-parameter sensor for measuring pressure and temperature are considered. Simulation of a two-parameter measuring transducer has been carried out and its calibration characteristics have been obtained." @default.
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- W2907248403 date "2018-10-01" @default.
- W2907248403 modified "2023-09-25" @default.
- W2907248403 title "Two-Parameter Pressure and Temperature Measuring Transducer Based on a Voltage-Controlled MEMS-Elements" @default.
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- W2907248403 doi "https://doi.org/10.1109/iecon.2018.8591369" @default.
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