FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2910348738> ?p ?o ?g. }

• W2910348738 endingPage "1946" @default.
• W2910348738 startingPage "1943" @default.
• W2910348738 abstract "An efficient process for ALD FexN films was reported in this study for the first time. Bis(N,N'-di-tert-butylacetamidinato)iron(ii) (Fe(tBu-amd)2) and anhydrous hydrazine (N2H4) were used as reactants. Ideal self-limiting growth behavior was confirmed through the effect of the reactant dose and deposition cycle number on the growth rate (film thickness). Besides, these pure FexN films were able to grow into trench substrates with an aspect ratio of 2.5 : 1 conformally and uniformly, highlighting the potential of this ALD process for complex 3D or porous structures. The possible mechanism was proposed by investigating the reaction between Fe(tBu-amd)2 and N2H4 in toluene, and performing first-principles calculations. Our ALD process is expected to promote the development of FexN-based nanoengineering for its broad applications." @default.
• W2910348738 created "2019-01-25" @default.
• W2910348738 creator A5005232293 @default.
• W2910348738 creator A5011004311 @default.
• W2910348738 creator A5027591985 @default.
• W2910348738 creator A5059055214 @default.
• W2910348738 creator A5070197305 @default.
• W2910348738 date "2019-01-01" @default.
• W2910348738 modified "2023-10-15" @default.
• W2910348738 title "The first atomic layer deposition process for Fe_xN films" @default.
• W2910348738 cites W1862869462 @default.
• W2910348738 cites W1978145918 @default.
• W2910348738 cites W1981368803 @default.
• W2910348738 cites W1986260382 @default.
• W2910348738 cites W1994495097 @default.
• W2910348738 cites W2000417421 @default.
• W2910348738 cites W2005724178 @default.
• W2910348738 cites W2007395042 @default.
• W2910348738 cites W2014992954 @default.
• W2910348738 cites W2023603575 @default.
• W2910348738 cites W2025172217 @default.
• W2910348738 cites W2029328758 @default.
• W2910348738 cites W2029687087 @default.
• W2910348738 cites W2033939976 @default.
• W2910348738 cites W2035931858 @default.
• W2910348738 cites W2036585447 @default.
• W2910348738 cites W2053000681 @default.
• W2910348738 cites W2055805112 @default.
• W2910348738 cites W2063392340 @default.
• W2910348738 cites W2066666085 @default.
• W2910348738 cites W2079105963 @default.
• W2910348738 cites W2083222334 @default.
• W2910348738 cites W2087698390 @default.
• W2910348738 cites W2089746944 @default.
• W2910348738 cites W2090197855 @default.
• W2910348738 cites W2095518271 @default.
• W2910348738 cites W2118817262 @default.
• W2910348738 cites W2158932701 @default.
• W2910348738 cites W2165999655 @default.
• W2910348738 cites W2316941403 @default.
• W2910348738 cites W2326995674 @default.
• W2910348738 cites W2562787146 @default.
• W2910348738 cites W2587010190 @default.
• W2910348738 cites W2628373425 @default.
• W2910348738 cites W2900567006 @default.
• W2910348738 cites W4253229188 @default.
• W2910348738 doi "https://doi.org/10.1039/c8cc10175b" @default.
• W2910348738 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30681083" @default.
• W2910348738 hasPublicationYear "2019" @default.
• W2910348738 type Work @default.
• W2910348738 sameAs 2910348738 @default.
• W2910348738 citedByCount "9" @default.
• W2910348738 countsByYear W29103487382019 @default.
• W2910348738 countsByYear W29103487382020 @default.
• W2910348738 countsByYear W29103487382021 @default.
• W2910348738 countsByYear W29103487382022 @default.
• W2910348738 crossrefType "journal-article" @default.
• W2910348738 hasAuthorship W2910348738A5005232293 @default.
• W2910348738 hasAuthorship W2910348738A5011004311 @default.
• W2910348738 hasAuthorship W2910348738A5027591985 @default.
• W2910348738 hasAuthorship W2910348738A5059055214 @default.
• W2910348738 hasAuthorship W2910348738A5070197305 @default.
• W2910348738 hasConcept C127413603 @default.
• W2910348738 hasConcept C151730666 @default.
• W2910348738 hasConcept C155310634 @default.
• W2910348738 hasConcept C159951928 @default.
• W2910348738 hasConcept C171250308 @default.
• W2910348738 hasConcept C178790620 @default.
• W2910348738 hasConcept C185592680 @default.
• W2910348738 hasConcept C187714232 @default.
• W2910348738 hasConcept C188198153 @default.
• W2910348738 hasConcept C19067145 @default.
• W2910348738 hasConcept C192562407 @default.
• W2910348738 hasConcept C2779227376 @default.
• W2910348738 hasConcept C2816523 @default.
• W2910348738 hasConcept C42360764 @default.
• W2910348738 hasConcept C64297162 @default.
• W2910348738 hasConcept C69544855 @default.
• W2910348738 hasConcept C78519656 @default.
• W2910348738 hasConcept C86803240 @default.
• W2910348738 hasConceptScore W2910348738C127413603 @default.
• W2910348738 hasConceptScore W2910348738C151730666 @default.
• W2910348738 hasConceptScore W2910348738C155310634 @default.
• W2910348738 hasConceptScore W2910348738C159951928 @default.
• W2910348738 hasConceptScore W2910348738C171250308 @default.
• W2910348738 hasConceptScore W2910348738C178790620 @default.
• W2910348738 hasConceptScore W2910348738C185592680 @default.
• W2910348738 hasConceptScore W2910348738C187714232 @default.
• W2910348738 hasConceptScore W2910348738C188198153 @default.
• W2910348738 hasConceptScore W2910348738C19067145 @default.
• W2910348738 hasConceptScore W2910348738C192562407 @default.
• W2910348738 hasConceptScore W2910348738C2779227376 @default.
• W2910348738 hasConceptScore W2910348738C2816523 @default.
• W2910348738 hasConceptScore W2910348738C42360764 @default.
• W2910348738 hasConceptScore W2910348738C64297162 @default.
• W2910348738 hasConceptScore W2910348738C69544855 @default.
• W2910348738 hasConceptScore W2910348738C78519656 @default.
• W2910348738 hasConceptScore W2910348738C86803240 @default.

• next