Matches in SemOpenAlex for { <https://semopenalex.org/work/W2910534775> ?p ?o ?g. }
- W2910534775 abstract "A low-power three-degree-of-freedom scanning micromirror is presented. The 2- × 2-mm mirror is a gimbaless structure, directly supported by single-crystal microsprings. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third-axis. The transient and frequency responses of the micromirror are analyzed. The Lagrange’s equations of motions describing the dynamic behavior of the system are presented and show a good agreement with the experimental results. The fabricated microelectromechanical system mirror demonstrates a tilt angle of 22.8 deg at 247.5 Hz about y-axis, and 13.3 deg at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20-mA current on the mirror. Power consumption is 2.6 mW of power in tilting motions in resonant operation. With a total DC-drive current of 110 mA, 232-μm linear motion is achieved." @default.
- W2910534775 created "2019-01-25" @default.
- W2910534775 creator A5007489665 @default.
- W2910534775 creator A5013276421 @default.
- W2910534775 creator A5067046356 @default.
- W2910534775 creator A5083452324 @default.
- W2910534775 creator A5090235448 @default.
- W2910534775 date "2019-01-14" @default.
- W2910534775 modified "2023-09-25" @default.
- W2910534775 title "Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications" @default.
- W2910534775 cites W1965100021 @default.
- W2910534775 cites W1984189744 @default.
- W2910534775 cites W1993082007 @default.
- W2910534775 cites W2003497722 @default.
- W2910534775 cites W2008934722 @default.
- W2910534775 cites W2015612070 @default.
- W2910534775 cites W2023061992 @default.
- W2910534775 cites W2040514854 @default.
- W2910534775 cites W2052098833 @default.
- W2910534775 cites W2071185396 @default.
- W2910534775 cites W2071491909 @default.
- W2910534775 cites W2074797523 @default.
- W2910534775 cites W2078241882 @default.
- W2910534775 cites W2078858675 @default.
- W2910534775 cites W2122378987 @default.
- W2910534775 cites W2125983880 @default.
- W2910534775 cites W2139547277 @default.
- W2910534775 cites W2140326807 @default.
- W2910534775 cites W2146719344 @default.
- W2910534775 cites W2150495532 @default.
- W2910534775 cites W2163321594 @default.
- W2910534775 cites W2166949964 @default.
- W2910534775 cites W2246613334 @default.
- W2910534775 cites W2262727781 @default.
- W2910534775 cites W2271449868 @default.
- W2910534775 cites W2330965733 @default.
- W2910534775 cites W2400338016 @default.
- W2910534775 cites W2502745960 @default.
- W2910534775 cites W2557640319 @default.
- W2910534775 cites W2612985706 @default.
- W2910534775 cites W2703611776 @default.
- W2910534775 cites W2742681573 @default.
- W2910534775 cites W2743311852 @default.
- W2910534775 doi "https://doi.org/10.1117/1.jmm.18.1.015001" @default.
- W2910534775 hasPublicationYear "2019" @default.
- W2910534775 type Work @default.
- W2910534775 sameAs 2910534775 @default.
- W2910534775 citedByCount "0" @default.
- W2910534775 crossrefType "journal-article" @default.
- W2910534775 hasAuthorship W2910534775A5007489665 @default.
- W2910534775 hasAuthorship W2910534775A5013276421 @default.
- W2910534775 hasAuthorship W2910534775A5067046356 @default.
- W2910534775 hasAuthorship W2910534775A5083452324 @default.
- W2910534775 hasAuthorship W2910534775A5090235448 @default.
- W2910534775 hasBestOaLocation W29105347752 @default.
- W2910534775 hasConcept C111919701 @default.
- W2910534775 hasConcept C115260700 @default.
- W2910534775 hasConcept C120665830 @default.
- W2910534775 hasConcept C121332964 @default.
- W2910534775 hasConcept C127413603 @default.
- W2910534775 hasConcept C140190676 @default.
- W2910534775 hasConcept C15336307 @default.
- W2910534775 hasConcept C163258240 @default.
- W2910534775 hasConcept C2779844322 @default.
- W2910534775 hasConcept C2780799671 @default.
- W2910534775 hasConcept C3756478 @default.
- W2910534775 hasConcept C37977207 @default.
- W2910534775 hasConcept C41008148 @default.
- W2910534775 hasConcept C49040817 @default.
- W2910534775 hasConcept C5667645 @default.
- W2910534775 hasConcept C62520636 @default.
- W2910534775 hasConcept C74650414 @default.
- W2910534775 hasConcept C78519656 @default.
- W2910534775 hasConceptScore W2910534775C111919701 @default.
- W2910534775 hasConceptScore W2910534775C115260700 @default.
- W2910534775 hasConceptScore W2910534775C120665830 @default.
- W2910534775 hasConceptScore W2910534775C121332964 @default.
- W2910534775 hasConceptScore W2910534775C127413603 @default.
- W2910534775 hasConceptScore W2910534775C140190676 @default.
- W2910534775 hasConceptScore W2910534775C15336307 @default.
- W2910534775 hasConceptScore W2910534775C163258240 @default.
- W2910534775 hasConceptScore W2910534775C2779844322 @default.
- W2910534775 hasConceptScore W2910534775C2780799671 @default.
- W2910534775 hasConceptScore W2910534775C3756478 @default.
- W2910534775 hasConceptScore W2910534775C37977207 @default.
- W2910534775 hasConceptScore W2910534775C41008148 @default.
- W2910534775 hasConceptScore W2910534775C49040817 @default.
- W2910534775 hasConceptScore W2910534775C5667645 @default.
- W2910534775 hasConceptScore W2910534775C62520636 @default.
- W2910534775 hasConceptScore W2910534775C74650414 @default.
- W2910534775 hasConceptScore W2910534775C78519656 @default.
- W2910534775 hasLocation W29105347751 @default.
- W2910534775 hasLocation W29105347752 @default.
- W2910534775 hasOpenAccess W2910534775 @default.
- W2910534775 hasPrimaryLocation W29105347751 @default.
- W2910534775 hasRelatedWork W1992258920 @default.
- W2910534775 hasRelatedWork W2004620024 @default.
- W2910534775 hasRelatedWork W2050684828 @default.
- W2910534775 hasRelatedWork W2073396023 @default.
- W2910534775 hasRelatedWork W2162306920 @default.