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• W2911209416 endingPage "14" @default.
• W2911209416 startingPage "8" @default.
• W2911209416 abstract "Nitrogen-doped hydrogenated amorphous carbon films (a-C:H:N) have been prepared by a plasma-activated chemical vapor deposition technique (PACVD) by using a plasma beam source (PBS). The properties of the a-C:H:N films were changed by varying the total pressure, the substrate temperature (100 °C, 300 °C) and nitrogen partial pressure p(N2) by adding nitrogen to the precursor acetylene (C2H2). For the investigations, a-C:H:N films have been deposited onto glass slides and doped silicon wafers. The deposition rate decreased with increasing nitrogen content in the N2/C2H2 gas mixture and with decreasing total pressure. The elemental composition of two sample series (300 °C) has been analyzed with Elastic Recoil Detection Analysis (ERDA). The highest N content and N/C ratio was estimated to be 16 at.% and 0.25 at the highest p(N2), respectively. Microhardness measurements showed that the hardness decreased with increasing p(N2). Electrical resistance of the a-C:H:N films was measured by 4-point probe. Electrically conductive coatings have been obtained by nitrogen-doped a-C:H films at higher substrate temperature (300 °C). The electrical resistance of the a-C:H:N films also decreases with decreasing total pressure, with the lowest value being about 1 Ohm cm. The film density was determined by means of X-ray reflectometry (XRR)." @default.
• W2911209416 created "2019-01-25" @default.
• W2911209416 creator A5004694022 @default.
• W2911209416 creator A5011071921 @default.
• W2911209416 creator A5082793956 @default.
• W2911209416 creator A5086529765 @default.
• W2911209416 date "2019-04-01" @default.
• W2911209416 modified "2023-10-16" @default.
• W2911209416 title "Physical and electrical properties of nitrogen-doped hydrogenated amorphous carbon films" @default.
• W2911209416 cites W1034732479 @default.
• W2911209416 cites W1537849351 @default.
• W2911209416 cites W1964695924 @default.
• W2911209416 cites W1966144050 @default.
• W2911209416 cites W1974405759 @default.
• W2911209416 cites W1988761762 @default.
• W2911209416 cites W1989324368 @default.
• W2911209416 cites W1989405923 @default.
• W2911209416 cites W1989963057 @default.
• W2911209416 cites W1995000662 @default.
• W2911209416 cites W2003660576 @default.
• W2911209416 cites W2012806929 @default.
• W2911209416 cites W2013941486 @default.
• W2911209416 cites W2024764666 @default.
• W2911209416 cites W2025765853 @default.
• W2911209416 cites W2047818238 @default.
• W2911209416 cites W2049069202 @default.
• W2911209416 cites W2052247864 @default.
• W2911209416 cites W2061486574 @default.
• W2911209416 cites W2075713279 @default.
• W2911209416 cites W2085029468 @default.
• W2911209416 cites W2092476503 @default.
• W2911209416 cites W2092675808 @default.
• W2911209416 cites W2095532161 @default.
• W2911209416 cites W2111497230 @default.
• W2911209416 cites W2113420097 @default.
• W2911209416 cites W2151692261 @default.
• W2911209416 cites W2157104937 @default.
• W2911209416 cites W2334834016 @default.
• W2911209416 cites W4229488804 @default.
• W2911209416 cites W4245059032 @default.
• W2911209416 cites W4385797254 @default.
• W2911209416 doi "https://doi.org/10.1016/j.vacuum.2019.01.018" @default.
• W2911209416 hasPublicationYear "2019" @default.
• W2911209416 type Work @default.
• W2911209416 sameAs 2911209416 @default.
• W2911209416 citedByCount "9" @default.
• W2911209416 countsByYear W29112094162020 @default.
• W2911209416 countsByYear W29112094162021 @default.
• W2911209416 countsByYear W29112094162022 @default.
• W2911209416 countsByYear W29112094162023 @default.
• W2911209416 crossrefType "journal-article" @default.
• W2911209416 hasAuthorship W2911209416A5004694022 @default.
• W2911209416 hasAuthorship W2911209416A5011071921 @default.
• W2911209416 hasAuthorship W2911209416A5082793956 @default.
• W2911209416 hasAuthorship W2911209416A5086529765 @default.
• W2911209416 hasConcept C111368507 @default.
• W2911209416 hasConcept C113196181 @default.
• W2911209416 hasConcept C119599485 @default.
• W2911209416 hasConcept C127313418 @default.
• W2911209416 hasConcept C127413603 @default.
• W2911209416 hasConcept C171250308 @default.
• W2911209416 hasConcept C178790620 @default.
• W2911209416 hasConcept C185592680 @default.
• W2911209416 hasConcept C19067145 @default.
• W2911209416 hasConcept C192562407 @default.
• W2911209416 hasConcept C201931942 @default.
• W2911209416 hasConcept C2776523803 @default.
• W2911209416 hasConcept C2777289219 @default.
• W2911209416 hasConcept C38347018 @default.
• W2911209416 hasConcept C43617362 @default.
• W2911209416 hasConcept C537208039 @default.
• W2911209416 hasConcept C55148256 @default.
• W2911209416 hasConcept C56052488 @default.
• W2911209416 hasConcept C57410435 @default.
• W2911209416 hasConcept C69990965 @default.
• W2911209416 hasConcept C75937256 @default.
• W2911209416 hasConcept C8010536 @default.
• W2911209416 hasConceptScore W2911209416C111368507 @default.
• W2911209416 hasConceptScore W2911209416C113196181 @default.
• W2911209416 hasConceptScore W2911209416C119599485 @default.
• W2911209416 hasConceptScore W2911209416C127313418 @default.
• W2911209416 hasConceptScore W2911209416C127413603 @default.
• W2911209416 hasConceptScore W2911209416C171250308 @default.
• W2911209416 hasConceptScore W2911209416C178790620 @default.
• W2911209416 hasConceptScore W2911209416C185592680 @default.
• W2911209416 hasConceptScore W2911209416C19067145 @default.
• W2911209416 hasConceptScore W2911209416C192562407 @default.
• W2911209416 hasConceptScore W2911209416C201931942 @default.
• W2911209416 hasConceptScore W2911209416C2776523803 @default.
• W2911209416 hasConceptScore W2911209416C2777289219 @default.
• W2911209416 hasConceptScore W2911209416C38347018 @default.
• W2911209416 hasConceptScore W2911209416C43617362 @default.
• W2911209416 hasConceptScore W2911209416C537208039 @default.
• W2911209416 hasConceptScore W2911209416C55148256 @default.
• W2911209416 hasConceptScore W2911209416C56052488 @default.
• W2911209416 hasConceptScore W2911209416C57410435 @default.
• W2911209416 hasConceptScore W2911209416C69990965 @default.
• W2911209416 hasConceptScore W2911209416C75937256 @default.

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