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• W2911280147 abstract "The effect of a high‐energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high‐energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron‐stimulated desorption of oxygen atoms and electron‐stimulated decomposition of ammonia molecules." @default.
• W2911280147 created "2019-02-21" @default.
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• W2911280147 date "2019-02-15" @default.
• W2911280147 modified "2023-10-16" @default.
• W2911280147 title "Electron‐Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface" @default.
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• W2911280147 doi "https://doi.org/10.1002/pssb.201800516" @default.
• W2911280147 hasPublicationYear "2019" @default.
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