Matches in SemOpenAlex for { <https://semopenalex.org/work/W2911700641> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2911700641 abstract "Electroless deposited (ELD) cobalt with palladium as a catalyst, and an underlying self-assembled monolayer (SAM) was investigated for potential use in advanced complementary metal oxide semiconductor (CMOS) applications using both hard (HAXPES) and soft (XPS) x-ray photoelectron spectroscopy. HAXPES spectra established the uniformity of the deposited Co film and the nature of the buried Co-Si interface ~20nm below the surface. The Pd is seen to diffuse through the Co following thermal annealing. While the deposited Co film is predominantly metallic, Co-silicide forms at the Co-Si interface upon deposition and decomposes with thermal anneal up to 500°C." @default.
- W2911700641 created "2019-02-21" @default.
- W2911700641 creator A5003311069 @default.
- W2911700641 creator A5020118291 @default.
- W2911700641 creator A5034819406 @default.
- W2911700641 creator A5038878125 @default.
- W2911700641 creator A5048498685 @default.
- W2911700641 creator A5079693629 @default.
- W2911700641 date "2018-07-01" @default.
- W2911700641 modified "2023-10-02" @default.
- W2911700641 title "Characterisation of Electroless Deposited Cobalt by Hard and Soft X-ray Photoemission Spectroscopy" @default.
- W2911700641 cites W1971286752 @default.
- W2911700641 cites W1974047102 @default.
- W2911700641 cites W1975694124 @default.
- W2911700641 cites W2008387754 @default.
- W2911700641 cites W2023120050 @default.
- W2911700641 cites W2056311036 @default.
- W2911700641 cites W2081588947 @default.
- W2911700641 cites W2162163123 @default.
- W2911700641 cites W2198786368 @default.
- W2911700641 cites W2215803977 @default.
- W2911700641 cites W2463111817 @default.
- W2911700641 cites W2555184189 @default.
- W2911700641 cites W2739929345 @default.
- W2911700641 cites W2744949768 @default.
- W2911700641 cites W2787310733 @default.
- W2911700641 doi "https://doi.org/10.1109/nano.2018.8626253" @default.
- W2911700641 hasPublicationYear "2018" @default.
- W2911700641 type Work @default.
- W2911700641 sameAs 2911700641 @default.
- W2911700641 citedByCount "0" @default.
- W2911700641 crossrefType "proceedings-article" @default.
- W2911700641 hasAuthorship W2911700641A5003311069 @default.
- W2911700641 hasAuthorship W2911700641A5020118291 @default.
- W2911700641 hasAuthorship W2911700641A5034819406 @default.
- W2911700641 hasAuthorship W2911700641A5038878125 @default.
- W2911700641 hasAuthorship W2911700641A5048498685 @default.
- W2911700641 hasAuthorship W2911700641A5079693629 @default.
- W2911700641 hasBestOaLocation W29117006412 @default.
- W2911700641 hasConcept C113196181 @default.
- W2911700641 hasConcept C127413603 @default.
- W2911700641 hasConcept C161790260 @default.
- W2911700641 hasConcept C171250308 @default.
- W2911700641 hasConcept C175708663 @default.
- W2911700641 hasConcept C185592680 @default.
- W2911700641 hasConcept C19067145 @default.
- W2911700641 hasConcept C191897082 @default.
- W2911700641 hasConcept C192562407 @default.
- W2911700641 hasConcept C2777855556 @default.
- W2911700641 hasConcept C2780901251 @default.
- W2911700641 hasConcept C42360764 @default.
- W2911700641 hasConcept C43617362 @default.
- W2911700641 hasConcept C49040817 @default.
- W2911700641 hasConcept C502130503 @default.
- W2911700641 hasConcept C51286037 @default.
- W2911700641 hasConcept C515602321 @default.
- W2911700641 hasConcept C544956773 @default.
- W2911700641 hasConcept C55493867 @default.
- W2911700641 hasConcept C7070889 @default.
- W2911700641 hasConceptScore W2911700641C113196181 @default.
- W2911700641 hasConceptScore W2911700641C127413603 @default.
- W2911700641 hasConceptScore W2911700641C161790260 @default.
- W2911700641 hasConceptScore W2911700641C171250308 @default.
- W2911700641 hasConceptScore W2911700641C175708663 @default.
- W2911700641 hasConceptScore W2911700641C185592680 @default.
- W2911700641 hasConceptScore W2911700641C19067145 @default.
- W2911700641 hasConceptScore W2911700641C191897082 @default.
- W2911700641 hasConceptScore W2911700641C192562407 @default.
- W2911700641 hasConceptScore W2911700641C2777855556 @default.
- W2911700641 hasConceptScore W2911700641C2780901251 @default.
- W2911700641 hasConceptScore W2911700641C42360764 @default.
- W2911700641 hasConceptScore W2911700641C43617362 @default.
- W2911700641 hasConceptScore W2911700641C49040817 @default.
- W2911700641 hasConceptScore W2911700641C502130503 @default.
- W2911700641 hasConceptScore W2911700641C51286037 @default.
- W2911700641 hasConceptScore W2911700641C515602321 @default.
- W2911700641 hasConceptScore W2911700641C544956773 @default.
- W2911700641 hasConceptScore W2911700641C55493867 @default.
- W2911700641 hasConceptScore W2911700641C7070889 @default.
- W2911700641 hasLocation W29117006411 @default.
- W2911700641 hasLocation W29117006412 @default.
- W2911700641 hasOpenAccess W2911700641 @default.
- W2911700641 hasPrimaryLocation W29117006411 @default.
- W2911700641 hasRelatedWork W1966589843 @default.
- W2911700641 hasRelatedWork W1989960785 @default.
- W2911700641 hasRelatedWork W2008171903 @default.
- W2911700641 hasRelatedWork W2019028085 @default.
- W2911700641 hasRelatedWork W2034721358 @default.
- W2911700641 hasRelatedWork W2039380326 @default.
- W2911700641 hasRelatedWork W2047855785 @default.
- W2911700641 hasRelatedWork W2049388782 @default.
- W2911700641 hasRelatedWork W2920343941 @default.
- W2911700641 hasRelatedWork W2338504435 @default.
- W2911700641 isParatext "false" @default.
- W2911700641 isRetracted "false" @default.
- W2911700641 magId "2911700641" @default.
- W2911700641 workType "article" @default.