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- W2912083605 abstract "We developed a fabrication method of high-aspect-ratio fine vias with a build-up resin. The build-up resin composed of a thermosetting resin and silica fillers has low coefficient of thermal expansion and low dielectric constant. Thermal imprint was performed to form the high-aspect-ratio fine via holes on the build-up resin. The imprint mold with high-aspect-ratio fine pillar patterns was fabricated by photolithography and deep reactive ion etching. The residual layer consisted of the thermosetting resin and the silica filler was removed by O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> /CHF <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> plasma etching. The via of 1.2 μm in diameter with aspect ratio of 5.5, and 5.0 μm in pitch was successfully fabricated followed by Au electroplating. The proposed fabrication method is applicable for high-density 3-dimensional and 2.5-dimensional integration technologies." @default.
- W2912083605 created "2019-02-21" @default.
- W2912083605 creator A5006319590 @default.
- W2912083605 creator A5015828853 @default.
- W2912083605 creator A5023422264 @default.
- W2912083605 creator A5029723876 @default.
- W2912083605 creator A5041031153 @default.
- W2912083605 creator A5074944630 @default.
- W2912083605 creator A5076831590 @default.
- W2912083605 creator A5079279935 @default.
- W2912083605 date "2018-10-01" @default.
- W2912083605 modified "2023-09-25" @default.
- W2912083605 title "High-aspect-ratio Sub-2-μm Vias Using Thermal Imprint with Build-up Resin" @default.
- W2912083605 cites W1969576532 @default.
- W2912083605 cites W1978999024 @default.
- W2912083605 cites W1981895703 @default.
- W2912083605 cites W2002042493 @default.
- W2912083605 cites W2019390032 @default.
- W2912083605 cites W2020151441 @default.
- W2912083605 cites W2023264348 @default.
- W2912083605 cites W2027785931 @default.
- W2912083605 cites W2039601113 @default.
- W2912083605 cites W2068529528 @default.
- W2912083605 cites W2090869650 @default.
- W2912083605 cites W2112285517 @default.
- W2912083605 cites W2113480548 @default.
- W2912083605 cites W2149265172 @default.
- W2912083605 cites W2552673010 @default.
- W2912083605 cites W2767728911 @default.
- W2912083605 cites W2768596691 @default.
- W2912083605 cites W2776971062 @default.
- W2912083605 doi "https://doi.org/10.1109/impact.2018.8625825" @default.
- W2912083605 hasPublicationYear "2018" @default.
- W2912083605 type Work @default.
- W2912083605 sameAs 2912083605 @default.
- W2912083605 citedByCount "3" @default.
- W2912083605 countsByYear W29120836052019 @default.
- W2912083605 countsByYear W29120836052020 @default.
- W2912083605 crossrefType "proceedings-article" @default.
- W2912083605 hasAuthorship W2912083605A5006319590 @default.
- W2912083605 hasAuthorship W2912083605A5015828853 @default.
- W2912083605 hasAuthorship W2912083605A5023422264 @default.
- W2912083605 hasAuthorship W2912083605A5029723876 @default.
- W2912083605 hasAuthorship W2912083605A5041031153 @default.
- W2912083605 hasAuthorship W2912083605A5074944630 @default.
- W2912083605 hasAuthorship W2912083605A5076831590 @default.
- W2912083605 hasAuthorship W2912083605A5079279935 @default.
- W2912083605 hasConcept C100460472 @default.
- W2912083605 hasConcept C105487726 @default.
- W2912083605 hasConcept C121332964 @default.
- W2912083605 hasConcept C133386390 @default.
- W2912083605 hasConcept C134406635 @default.
- W2912083605 hasConcept C136525101 @default.
- W2912083605 hasConcept C142724271 @default.
- W2912083605 hasConcept C153294291 @default.
- W2912083605 hasConcept C159985019 @default.
- W2912083605 hasConcept C171250308 @default.
- W2912083605 hasConcept C171359207 @default.
- W2912083605 hasConcept C192562407 @default.
- W2912083605 hasConcept C204530211 @default.
- W2912083605 hasConcept C204787440 @default.
- W2912083605 hasConcept C2779227376 @default.
- W2912083605 hasConcept C49040817 @default.
- W2912083605 hasConcept C71924100 @default.
- W2912083605 hasConcept C82558694 @default.
- W2912083605 hasConceptScore W2912083605C100460472 @default.
- W2912083605 hasConceptScore W2912083605C105487726 @default.
- W2912083605 hasConceptScore W2912083605C121332964 @default.
- W2912083605 hasConceptScore W2912083605C133386390 @default.
- W2912083605 hasConceptScore W2912083605C134406635 @default.
- W2912083605 hasConceptScore W2912083605C136525101 @default.
- W2912083605 hasConceptScore W2912083605C142724271 @default.
- W2912083605 hasConceptScore W2912083605C153294291 @default.
- W2912083605 hasConceptScore W2912083605C159985019 @default.
- W2912083605 hasConceptScore W2912083605C171250308 @default.
- W2912083605 hasConceptScore W2912083605C171359207 @default.
- W2912083605 hasConceptScore W2912083605C192562407 @default.
- W2912083605 hasConceptScore W2912083605C204530211 @default.
- W2912083605 hasConceptScore W2912083605C204787440 @default.
- W2912083605 hasConceptScore W2912083605C2779227376 @default.
- W2912083605 hasConceptScore W2912083605C49040817 @default.
- W2912083605 hasConceptScore W2912083605C71924100 @default.
- W2912083605 hasConceptScore W2912083605C82558694 @default.
- W2912083605 hasLocation W29120836051 @default.
- W2912083605 hasOpenAccess W2912083605 @default.
- W2912083605 hasPrimaryLocation W29120836051 @default.
- W2912083605 hasRelatedWork W1551102922 @default.
- W2912083605 hasRelatedWork W1966895858 @default.
- W2912083605 hasRelatedWork W2043673973 @default.
- W2912083605 hasRelatedWork W2070838705 @default.
- W2912083605 hasRelatedWork W2087489911 @default.
- W2912083605 hasRelatedWork W2279318584 @default.
- W2912083605 hasRelatedWork W2375672519 @default.
- W2912083605 hasRelatedWork W2489430272 @default.
- W2912083605 hasRelatedWork W2951581608 @default.
- W2912083605 hasRelatedWork W2975304405 @default.
- W2912083605 isParatext "false" @default.
- W2912083605 isRetracted "false" @default.
- W2912083605 magId "2912083605" @default.
- W2912083605 workType "article" @default.