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• W2912098984 abstract "The first Very Large Scale Integration process with variable shape beam lithography for optomechanical devices is presented. State of the art performance was obtained with silicon microdisk resonators showing 1 million optical quality factors and 10−17m.Hz(−1/2) displacement resolution. Single-particle mass spectrometry could be performed with these optomechanical resonators in vacuum. The devices retained high performance when directly immersed in liquid media, allowing for biosensing experiments. These results open the door to large, dense arrays of optomechanical sensors." @default.
• W2912098984 created "2019-02-21" @default.
• W2912098984 creator A5000795917 @default.
• W2912098984 creator A5003027175 @default.
• W2912098984 creator A5008964394 @default.
• W2912098984 creator A5012520807 @default.
• W2912098984 creator A5012657801 @default.
• W2912098984 creator A5013266283 @default.
• W2912098984 creator A5015376908 @default.
• W2912098984 creator A5019155111 @default.
• W2912098984 creator A5020261257 @default.
• W2912098984 creator A5025598108 @default.
• W2912098984 creator A5033271744 @default.
• W2912098984 creator A5040121627 @default.
• W2912098984 creator A5040214507 @default.
• W2912098984 creator A5041835270 @default.
• W2912098984 creator A5042972128 @default.
• W2912098984 creator A5050101471 @default.
• W2912098984 creator A5052764241 @default.
• W2912098984 creator A5055715874 @default.
• W2912098984 creator A5062192112 @default.
• W2912098984 creator A5065001562 @default.
• W2912098984 creator A5065040698 @default.
• W2912098984 creator A5066658693 @default.
• W2912098984 creator A5067496974 @default.
• W2912098984 creator A5069249282 @default.
• W2912098984 creator A5070939792 @default.
• W2912098984 creator A5071474401 @default.
• W2912098984 creator A5074729841 @default.
• W2912098984 creator A5079113732 @default.
• W2912098984 creator A5080130787 @default.
• W2912098984 creator A5081624444 @default.
• W2912098984 creator A5083726347 @default.
• W2912098984 creator A5086251268 @default.
• W2912098984 date "2018-12-01" @default.
• W2912098984 modified "2023-10-16" @default.
• W2912098984 title "Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators?" @default.
• W2912098984 doi "https://doi.org/10.1109/iedm.2018.8614532" @default.
• W2912098984 hasPublicationYear "2018" @default.
• W2912098984 type Work @default.
• W2912098984 sameAs 2912098984 @default.
• W2912098984 citedByCount "0" @default.
• W2912098984 crossrefType "proceedings-article" @default.
• W2912098984 hasAuthorship W2912098984A5000795917 @default.
• W2912098984 hasAuthorship W2912098984A5003027175 @default.
• W2912098984 hasAuthorship W2912098984A5008964394 @default.
• W2912098984 hasAuthorship W2912098984A5012520807 @default.
• W2912098984 hasAuthorship W2912098984A5012657801 @default.
• W2912098984 hasAuthorship W2912098984A5013266283 @default.
• W2912098984 hasAuthorship W2912098984A5015376908 @default.
• W2912098984 hasAuthorship W2912098984A5019155111 @default.
• W2912098984 hasAuthorship W2912098984A5020261257 @default.
• W2912098984 hasAuthorship W2912098984A5025598108 @default.
• W2912098984 hasAuthorship W2912098984A5033271744 @default.
• W2912098984 hasAuthorship W2912098984A5040121627 @default.
• W2912098984 hasAuthorship W2912098984A5040214507 @default.
• W2912098984 hasAuthorship W2912098984A5041835270 @default.
• W2912098984 hasAuthorship W2912098984A5042972128 @default.
• W2912098984 hasAuthorship W2912098984A5050101471 @default.
• W2912098984 hasAuthorship W2912098984A5052764241 @default.
• W2912098984 hasAuthorship W2912098984A5055715874 @default.
• W2912098984 hasAuthorship W2912098984A5062192112 @default.
• W2912098984 hasAuthorship W2912098984A5065001562 @default.
• W2912098984 hasAuthorship W2912098984A5065040698 @default.
• W2912098984 hasAuthorship W2912098984A5066658693 @default.
• W2912098984 hasAuthorship W2912098984A5067496974 @default.
• W2912098984 hasAuthorship W2912098984A5069249282 @default.
• W2912098984 hasAuthorship W2912098984A5070939792 @default.
• W2912098984 hasAuthorship W2912098984A5071474401 @default.
• W2912098984 hasAuthorship W2912098984A5074729841 @default.
• W2912098984 hasAuthorship W2912098984A5079113732 @default.
• W2912098984 hasAuthorship W2912098984A5080130787 @default.
• W2912098984 hasAuthorship W2912098984A5081624444 @default.
• W2912098984 hasAuthorship W2912098984A5083726347 @default.
• W2912098984 hasAuthorship W2912098984A5086251268 @default.
• W2912098984 hasConcept C118552586 @default.
• W2912098984 hasConcept C121332964 @default.
• W2912098984 hasConcept C127413603 @default.
• W2912098984 hasConcept C141354745 @default.
• W2912098984 hasConcept C146978453 @default.
• W2912098984 hasConcept C15083742 @default.
• W2912098984 hasConcept C155672457 @default.
• W2912098984 hasConcept C15744967 @default.
• W2912098984 hasConcept C171250308 @default.
• W2912098984 hasConcept C173409883 @default.
• W2912098984 hasConcept C192562407 @default.
• W2912098984 hasConcept C2778755073 @default.
• W2912098984 hasConcept C2778965693 @default.
• W2912098984 hasConcept C2779998236 @default.
• W2912098984 hasConcept C41008148 @default.
• W2912098984 hasConcept C49040817 @default.
• W2912098984 hasConcept C62520636 @default.
• W2912098984 hasConcept C97126364 @default.
• W2912098984 hasConceptScore W2912098984C118552586 @default.
• W2912098984 hasConceptScore W2912098984C121332964 @default.
• W2912098984 hasConceptScore W2912098984C127413603 @default.
• W2912098984 hasConceptScore W2912098984C141354745 @default.
• W2912098984 hasConceptScore W2912098984C146978453 @default.
• W2912098984 hasConceptScore W2912098984C15083742 @default.
• W2912098984 hasConceptScore W2912098984C155672457 @default.

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