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- W2912140728 abstract "A new process for gate dielectric fabrication named in situ steam generation (ISSG) is reported.Based on the Deal-Grove model,an oxidation mechanism is proposed to break the Si-Si bond by an active atomic O and form a Si-O-Si bond during the oxidation process.The breakdown characteristics are investigated through a MOS-capacitor for both ISSG and furnace wet oxidation.The gate dielectric material generated by ISSG oxidation has a superior electrical performance owing to sufficient oxidation of weak Si-Si bonds relative to furnace wet oxidation,indicating a promising application in sub-micron IC device manufacturing." @default.
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- W2912140728 date "2008-02-28" @default.
- W2912140728 modified "2023-09-23" @default.
- W2912140728 title "Characterization of Gate Dielectric Using Oxides Generated by in situ Steam Generation" @default.
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