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- W2912151111 endingPage "5353" @default.
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- W2912151111 abstract "Dielectric metasurfaces based on amorphous silicon (a-Si) nanodisks are interesting for nanophotonic applications due to the high refractive index and mature/low temperature fabrication of a-Si. The investigated metasurfaces consist of a-Si nanodisk arrays embedded in a transparent film. The diameter-dependent optical properties of the nanodisk Mie resonators have been investigated by finite-difference time-domain (FDTD) simulations and spectrally-resolved reflectivity and transmission measurements. Well-ordered substrate-free a-Si nanodisk arrays were fabricated and characterized with regard to their broadband anti-reflection properties when placed on a crystalline silicon (c-Si) surface, and reflectivity/ transmission properties when embedded in a polydimethylsiloxane (PDMS) film. Our results confirm broadband anti-reflection when placed on silicon, while the optical characteristics of the nanodisks embedded in PDMS are shown to be potentially useful for color/NIR filter applications as well as for coloring on the micro/nanoscale." @default.
- W2912151111 created "2019-02-21" @default.
- W2912151111 creator A5041606407 @default.
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- W2912151111 date "2019-02-13" @default.
- W2912151111 modified "2023-10-16" @default.
- W2912151111 title "Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays" @default.
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- W2912151111 doi "https://doi.org/10.1364/oe.27.005353" @default.
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