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- W2912209406 abstract "The wafer process disasters is to use inherently safer design (ISD) strategies to take full account of the manufacturing plant is built to eliminate hazards of energy source; disasters and accidents must be greatly reduced. This study used concept of substituted wet bench chemicals from N-396 to replace to DSP.The experimental results due to the 11 batches and replaced of 10nm wafer process, the product yield increased to 85.36% from 83.75%, improvement of electrical characteristics DC (%) from 6.37% to 6.44, improvement of frequency response (%) from 5.27% down to 4.30%, improvement of stripping ability (%) from 4.47% to 4.20%." @default.
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- W2912209406 date "2018-10-01" @default.
- W2912209406 modified "2023-09-24" @default.
- W2912209406 title "Study of wafer cleaning process safety using Inherently Safer Design Strategies" @default.
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- W2912209406 doi "https://doi.org/10.1109/impact.2018.8625796" @default.
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