FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2912264807> ?p ?o ?g. }

• W2912264807 abstract "Advanced channel formation technologies called HEtero-layer-lift-off utilizing SiGe heteroepitaxy have been realized for fabricating ultrathin body (UTB) Ge-on-insulator (GeOI) structures. Insertion of SiGe etching stop layer was found to be effective for reducing GeOI body thickness ( $T_{mathrm {body}}$ ) fluctuation. Backside Si passivation for Ge/buried oxide interface has been verified to suppress backside Coulomb scattering and help to induce volume inversion effect. With improvement of backside interfacial quality and precise control of GeOI $T_{mathrm {body}}$ , primary carrier scattering factors in GeOI channel have been effectively reduced, resulting in significant improvement of hole mobility. High hole mobility of ~150 cm2/Vs in UTB GeOI pMOSFETs without strain technology has been demonstrated, which also outperformed Si universal mobility by 1.5 times even under $T_{mathrm {body}}$ of 9 nm. With low-thermal-budget process compatibility, UTB GeOI platform is very promising for future Ge large-scale integrated circuits devices used in monolithic 3-D integration scheme." @default.
• W2912264807 created "2019-02-21" @default.
• W2912264807 creator A5007916551 @default.
• W2912264807 creator A5012648716 @default.
• W2912264807 creator A5027046743 @default.
• W2912264807 creator A5054400789 @default.
• W2912264807 creator A5080097517 @default.
• W2912264807 date "2019-03-01" @default.
• W2912264807 modified "2023-10-16" @default.
• W2912264807 title "Physical Mechanisms of Mobility Enhancement in Ultrathin Body GeOI pMOSFETs Fabricated by HEtero-Layer-Lift-Off Technology" @default.
• W2912264807 cites W1600194817 @default.
• W2912264807 cites W1985359593 @default.
• W2912264807 cites W2000675013 @default.
• W2912264807 cites W2029428291 @default.
• W2912264807 cites W2043141080 @default.
• W2912264807 cites W2044853477 @default.
• W2912264807 cites W2066989548 @default.
• W2912264807 cites W2069297336 @default.
• W2912264807 cites W2079391869 @default.
• W2912264807 cites W2092172241 @default.
• W2912264807 cites W2104156013 @default.
• W2912264807 cites W2273707082 @default.
• W2912264807 cites W2461620692 @default.
• W2912264807 cites W2490395472 @default.
• W2912264807 cites W2563738010 @default.
• W2912264807 cites W2563941288 @default.
• W2912264807 cites W2585216313 @default.
• W2912264807 cites W2743681819 @default.
• W2912264807 cites W2743866044 @default.
• W2912264807 cites W2766720755 @default.
• W2912264807 cites W2785411896 @default.
• W2912264807 cites W2788825507 @default.
• W2912264807 cites W2899507589 @default.
• W2912264807 cites W2289355565 @default.
• W2912264807 doi "https://doi.org/10.1109/ted.2019.2895349" @default.
• W2912264807 hasPublicationYear "2019" @default.
• W2912264807 type Work @default.
• W2912264807 sameAs 2912264807 @default.
• W2912264807 citedByCount "7" @default.
• W2912264807 countsByYear W29122648072019 @default.
• W2912264807 countsByYear W29122648072020 @default.
• W2912264807 countsByYear W29122648072022 @default.
• W2912264807 crossrefType "journal-article" @default.
• W2912264807 hasAuthorship W2912264807A5007916551 @default.
• W2912264807 hasAuthorship W2912264807A5012648716 @default.
• W2912264807 hasAuthorship W2912264807A5027046743 @default.
• W2912264807 hasAuthorship W2912264807A5054400789 @default.
• W2912264807 hasAuthorship W2912264807A5080097517 @default.
• W2912264807 hasConcept C106782819 @default.
• W2912264807 hasConcept C119599485 @default.
• W2912264807 hasConcept C120665830 @default.
• W2912264807 hasConcept C121332964 @default.
• W2912264807 hasConcept C127413603 @default.
• W2912264807 hasConcept C165801399 @default.
• W2912264807 hasConcept C171250308 @default.
• W2912264807 hasConcept C172385210 @default.
• W2912264807 hasConcept C191485582 @default.
• W2912264807 hasConcept C191486275 @default.
• W2912264807 hasConcept C192562407 @default.
• W2912264807 hasConcept C24326235 @default.
• W2912264807 hasConcept C2778413303 @default.
• W2912264807 hasConcept C2779227376 @default.
• W2912264807 hasConcept C33574316 @default.
• W2912264807 hasConcept C41008148 @default.
• W2912264807 hasConcept C49040817 @default.
• W2912264807 hasConcept C53143962 @default.
• W2912264807 hasConcept C544956773 @default.
• W2912264807 hasConcept C76155785 @default.
• W2912264807 hasConceptScore W2912264807C106782819 @default.
• W2912264807 hasConceptScore W2912264807C119599485 @default.
• W2912264807 hasConceptScore W2912264807C120665830 @default.
• W2912264807 hasConceptScore W2912264807C121332964 @default.
• W2912264807 hasConceptScore W2912264807C127413603 @default.
• W2912264807 hasConceptScore W2912264807C165801399 @default.
• W2912264807 hasConceptScore W2912264807C171250308 @default.
• W2912264807 hasConceptScore W2912264807C172385210 @default.
• W2912264807 hasConceptScore W2912264807C191485582 @default.
• W2912264807 hasConceptScore W2912264807C191486275 @default.
• W2912264807 hasConceptScore W2912264807C192562407 @default.
• W2912264807 hasConceptScore W2912264807C24326235 @default.
• W2912264807 hasConceptScore W2912264807C2778413303 @default.
• W2912264807 hasConceptScore W2912264807C2779227376 @default.
• W2912264807 hasConceptScore W2912264807C33574316 @default.
• W2912264807 hasConceptScore W2912264807C41008148 @default.
• W2912264807 hasConceptScore W2912264807C49040817 @default.
• W2912264807 hasConceptScore W2912264807C53143962 @default.
• W2912264807 hasConceptScore W2912264807C544956773 @default.
• W2912264807 hasConceptScore W2912264807C76155785 @default.
• W2912264807 hasLocation W29122648071 @default.
• W2912264807 hasOpenAccess W2912264807 @default.
• W2912264807 hasPrimaryLocation W29122648071 @default.
• W2912264807 hasRelatedWork W1999001944 @default.
• W2912264807 hasRelatedWork W2001637322 @default.
• W2912264807 hasRelatedWork W2034665968 @default.
• W2912264807 hasRelatedWork W2036439327 @default.
• W2912264807 hasRelatedWork W2058756776 @default.
• W2912264807 hasRelatedWork W2074698279 @default.
• W2912264807 hasRelatedWork W2092129976 @default.
• W2912264807 hasRelatedWork W2338840401 @default.
• W2912264807 hasRelatedWork W2362870002 @default.

• next