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- W2912303238 abstract "Abstract The effects of thicknesses of AlN layer on microstructures and properties of TiAlN/AlN multilayers were studied. TiAlN/AlN multilayers had been deposited on 304 stainless steels by magnetron sputtering system. The microstructure and properties of the multilayers were characterized by X-ray diffraction, vicker hardness tester, atomic force microscopy, and friction abrasion tester. The results show that under “template effect” of TiAlN layer, AlN layer is changed into face-centered cubic and grow epitaxially with TiAlN layer. The superhardness effect could be generated in the region with sharp interface. With the thickness of AlN layer in TiAlN/AlN multilayers, the properties of multilayer are firstly increase and then decrease. When the AlN layer thickness is 3.2 nm, the multilayer has excellent properties. The hardness of multilayer is 30.98 GPa, the roughness of multilayer is 20.2 nm, and the coefficient of friction of multilayer is 0.61." @default.
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- W2912303238 date "2019-04-01" @default.
- W2912303238 modified "2023-10-17" @default.
- W2912303238 title "Microstructure and properties of TiAlN/AlN multilayers with different modulation periods" @default.
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- W2912303238 doi "https://doi.org/10.1016/j.surfcoat.2019.01.064" @default.
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