FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2912336743> ?p ?o ?g. }

• W2912336743 abstract "Pulse laser annealing remains an actual problem aimed to crystallization of amorphous films on nonrefractive substrates. But, the most previous works studied laser crystallization of relatively thin (&lt;300 nm) a-Si:H films and mainly used excimer lasers. But, excimer lasers are not suitable for crystallization of submicron a-Si:H films due to low penetration depth in a-Si:H at such wavelengths. The problem can be resolved by using lasers with longer wavelengths. The desirable result of crystallization also depends on the choice of proper laser fluence, which is different for films with different hydrogen concentrations. In this work, the processes of a pulsed ruby laser induced crystallization of submicron (0.7 μm) amorphous hydrogenated silicon films with different hydrogen concentrations (2, 12, and 39 at. %) by different laser fluences were investigated. The films were prepared on glass substrates by plasma enhanced chemical vapor deposition technique followed by isothermal annealing in nitrogen atmosphere. The laser annealing (λ = 694 nm) was carried out at a pulse duration of 80 ns (full width at half-maximum) in the fluence range from 0.6 to 2.1 J/cm2. The laser fluence thresholds for surface area crystallization were found for different hydrogen concentrations in the films. The increase of hydrogen concentration leads to an increase of the threshold energy density (laser fluence) for surface area crystallization due to a decrease of light absorption in the films with a higher hydrogen concentration. Also, it was shown that ruby laser radiation can penetrate and partially crystallize the full depth of the submicron a-Si:H film, but the problem of homogeneity remains." @default.
• W2912336743 created "2019-02-21" @default.
• W2912336743 creator A5005535511 @default.
• W2912336743 creator A5009996114 @default.
• W2912336743 creator A5048677057 @default.
• W2912336743 creator A5063928924 @default.
• W2912336743 creator A5080192637 @default.
• W2912336743 date "2019-02-01" @default.
• W2912336743 modified "2023-09-26" @default.
• W2912336743 title "Crystallization of submicron amorphous hydrogenated silicon films with different hydrogen concentration by nanosecond ruby laser irradiation" @default.
• W2912336743 cites W1489687387 @default.
• W2912336743 cites W1975753418 @default.
• W2912336743 cites W1975929227 @default.
• W2912336743 cites W1988514338 @default.
• W2912336743 cites W1998429199 @default.
• W2912336743 cites W2003179143 @default.
• W2912336743 cites W2009498695 @default.
• W2912336743 cites W2016518808 @default.
• W2912336743 cites W2018138904 @default.
• W2912336743 cites W2021452859 @default.
• W2912336743 cites W2022588814 @default.
• W2912336743 cites W2039577473 @default.
• W2912336743 cites W2056393091 @default.
• W2912336743 cites W2073145405 @default.
• W2912336743 cites W2083484782 @default.
• W2912336743 cites W2083549953 @default.
• W2912336743 cites W2094601344 @default.
• W2912336743 cites W2230118957 @default.
• W2912336743 cites W2767166553 @default.
• W2912336743 cites W2851550815 @default.
• W2912336743 doi "https://doi.org/10.2351/1.5030791" @default.
• W2912336743 hasPublicationYear "2019" @default.
• W2912336743 type Work @default.
• W2912336743 sameAs 2912336743 @default.
• W2912336743 citedByCount "0" @default.
• W2912336743 crossrefType "journal-article" @default.
• W2912336743 hasAuthorship W2912336743A5005535511 @default.
• W2912336743 hasAuthorship W2912336743A5009996114 @default.
• W2912336743 hasAuthorship W2912336743A5048677057 @default.
• W2912336743 hasAuthorship W2912336743A5063928924 @default.
• W2912336743 hasAuthorship W2912336743A5080192637 @default.
• W2912336743 hasConcept C111337013 @default.
• W2912336743 hasConcept C113196181 @default.
• W2912336743 hasConcept C120665830 @default.
• W2912336743 hasConcept C121332964 @default.
• W2912336743 hasConcept C127413603 @default.
• W2912336743 hasConcept C159985019 @default.
• W2912336743 hasConcept C178790620 @default.
• W2912336743 hasConcept C185544564 @default.
• W2912336743 hasConcept C185592680 @default.
• W2912336743 hasConcept C192562407 @default.
• W2912336743 hasConcept C203036418 @default.
• W2912336743 hasConcept C22078206 @default.
• W2912336743 hasConcept C2776390347 @default.
• W2912336743 hasConcept C2777855556 @default.
• W2912336743 hasConcept C2778613923 @default.
• W2912336743 hasConcept C2779667780 @default.
• W2912336743 hasConcept C2780477314 @default.
• W2912336743 hasConcept C42360764 @default.
• W2912336743 hasConcept C43617362 @default.
• W2912336743 hasConcept C49040817 @default.
• W2912336743 hasConcept C512968161 @default.
• W2912336743 hasConcept C520434653 @default.
• W2912336743 hasConcept C544956773 @default.
• W2912336743 hasConcept C56052488 @default.
• W2912336743 hasConcept C8010536 @default.
• W2912336743 hasConceptScore W2912336743C111337013 @default.
• W2912336743 hasConceptScore W2912336743C113196181 @default.
• W2912336743 hasConceptScore W2912336743C120665830 @default.
• W2912336743 hasConceptScore W2912336743C121332964 @default.
• W2912336743 hasConceptScore W2912336743C127413603 @default.
• W2912336743 hasConceptScore W2912336743C159985019 @default.
• W2912336743 hasConceptScore W2912336743C178790620 @default.
• W2912336743 hasConceptScore W2912336743C185544564 @default.
• W2912336743 hasConceptScore W2912336743C185592680 @default.
• W2912336743 hasConceptScore W2912336743C192562407 @default.
• W2912336743 hasConceptScore W2912336743C203036418 @default.
• W2912336743 hasConceptScore W2912336743C22078206 @default.
• W2912336743 hasConceptScore W2912336743C2776390347 @default.
• W2912336743 hasConceptScore W2912336743C2777855556 @default.
• W2912336743 hasConceptScore W2912336743C2778613923 @default.
• W2912336743 hasConceptScore W2912336743C2779667780 @default.
• W2912336743 hasConceptScore W2912336743C2780477314 @default.
• W2912336743 hasConceptScore W2912336743C42360764 @default.
• W2912336743 hasConceptScore W2912336743C43617362 @default.
• W2912336743 hasConceptScore W2912336743C49040817 @default.
• W2912336743 hasConceptScore W2912336743C512968161 @default.
• W2912336743 hasConceptScore W2912336743C520434653 @default.
• W2912336743 hasConceptScore W2912336743C544956773 @default.
• W2912336743 hasConceptScore W2912336743C56052488 @default.
• W2912336743 hasConceptScore W2912336743C8010536 @default.
• W2912336743 hasIssue "1" @default.
• W2912336743 hasLocation W29123367431 @default.
• W2912336743 hasOpenAccess W2912336743 @default.
• W2912336743 hasPrimaryLocation W29123367431 @default.
• W2912336743 hasRelatedWork W1832459268 @default.
• W2912336743 hasRelatedWork W1978228868 @default.
• W2912336743 hasRelatedWork W1980964407 @default.
• W2912336743 hasRelatedWork W1996334310 @default.
• W2912336743 hasRelatedWork W2003108915 @default.

• next