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- W2912351164 endingPage "282" @default.
- W2912351164 startingPage "271" @default.
- W2912351164 abstract "Silicon crystal growth influences wafer processing in various ways. When silicon-on-insulator (SOI) wafers are made, different techniques result in different possible thicknesses for buried oxide layer and the top device silicon. Metallic impurities come from EGS polysilicon, the silica crucible, the graphite crucible and heaters and other hot parts of the crystal growth system. Gettering of impurities can be done either inside silicon or at the wafer back side. Wafer thicknesses are compromises between material usage and mechanical strength. Mechanical strength is especially important in high-temperature steps as many mechanical properties. Epitaxial layers are not defect-free, however; stacking faults created in epitaxial growth are the largest yield limiters in epitaxy. This chapter discusses three SOI techniques: bonded SOI, smart-cut and SIMOX. Bonding wafers with more layers on them leads to more complex wafers. These wafers are used by equipment makers in developing reactors, robotics, and associated tools and techniques. Controlled Vocabulary Terms epitaxial layers; mechanical strength; semiconductor technology; silicon-on-insulator; SIMOX" @default.
- W2912351164 created "2019-02-21" @default.
- W2912351164 creator A5006834180 @default.
- W2912351164 date "2010-09-17" @default.
- W2912351164 modified "2023-09-26" @default.
- W2912351164 title "Wafer Engineering" @default.
- W2912351164 cites W1969673130 @default.
- W2912351164 cites W1970916190 @default.
- W2912351164 cites W1971008086 @default.
- W2912351164 cites W1985038182 @default.
- W2912351164 cites W1986739708 @default.
- W2912351164 cites W1996561559 @default.
- W2912351164 cites W2018294356 @default.
- W2912351164 cites W2041165551 @default.
- W2912351164 cites W2045028212 @default.
- W2912351164 cites W2058670888 @default.
- W2912351164 cites W2075141252 @default.
- W2912351164 cites W2076104810 @default.
- W2912351164 cites W2079659865 @default.
- W2912351164 cites W2079699561 @default.
- W2912351164 cites W2087521992 @default.
- W2912351164 cites W2108019396 @default.
- W2912351164 cites W2122211541 @default.
- W2912351164 cites W2141977661 @default.
- W2912351164 cites W2147579874 @default.
- W2912351164 cites W2171458418 @default.
- W2912351164 cites W4206234296 @default.
- W2912351164 cites W4248907494 @default.
- W2912351164 cites W4380869199 @default.
- W2912351164 doi "https://doi.org/10.1002/9781119990413.ch22" @default.
- W2912351164 hasPublicationYear "2010" @default.
- W2912351164 type Work @default.
- W2912351164 sameAs 2912351164 @default.
- W2912351164 citedByCount "0" @default.
- W2912351164 crossrefType "other" @default.
- W2912351164 hasAuthorship W2912351164A5006834180 @default.
- W2912351164 hasConcept C110738630 @default.
- W2912351164 hasConcept C120500152 @default.
- W2912351164 hasConcept C127413603 @default.
- W2912351164 hasConcept C147597530 @default.
- W2912351164 hasConcept C159985019 @default.
- W2912351164 hasConcept C160671074 @default.
- W2912351164 hasConcept C185592680 @default.
- W2912351164 hasConcept C192562407 @default.
- W2912351164 hasConcept C24326235 @default.
- W2912351164 hasConcept C2779227376 @default.
- W2912351164 hasConcept C49040817 @default.
- W2912351164 hasConcept C53143962 @default.
- W2912351164 hasConcept C544956773 @default.
- W2912351164 hasConceptScore W2912351164C110738630 @default.
- W2912351164 hasConceptScore W2912351164C120500152 @default.
- W2912351164 hasConceptScore W2912351164C127413603 @default.
- W2912351164 hasConceptScore W2912351164C147597530 @default.
- W2912351164 hasConceptScore W2912351164C159985019 @default.
- W2912351164 hasConceptScore W2912351164C160671074 @default.
- W2912351164 hasConceptScore W2912351164C185592680 @default.
- W2912351164 hasConceptScore W2912351164C192562407 @default.
- W2912351164 hasConceptScore W2912351164C24326235 @default.
- W2912351164 hasConceptScore W2912351164C2779227376 @default.
- W2912351164 hasConceptScore W2912351164C49040817 @default.
- W2912351164 hasConceptScore W2912351164C53143962 @default.
- W2912351164 hasConceptScore W2912351164C544956773 @default.
- W2912351164 hasLocation W29123511641 @default.
- W2912351164 hasOpenAccess W2912351164 @default.
- W2912351164 hasPrimaryLocation W29123511641 @default.
- W2912351164 hasRelatedWork W1787443341 @default.
- W2912351164 hasRelatedWork W1977453585 @default.
- W2912351164 hasRelatedWork W1985855089 @default.
- W2912351164 hasRelatedWork W2047440913 @default.
- W2912351164 hasRelatedWork W2061052759 @default.
- W2912351164 hasRelatedWork W2071741888 @default.
- W2912351164 hasRelatedWork W2080157879 @default.
- W2912351164 hasRelatedWork W2087673424 @default.
- W2912351164 hasRelatedWork W2102841263 @default.
- W2912351164 hasRelatedWork W2127916613 @default.
- W2912351164 isParatext "false" @default.
- W2912351164 isRetracted "false" @default.
- W2912351164 magId "2912351164" @default.
- W2912351164 workType "other" @default.