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• W2912481203 abstract "Highly resistive homoepitaxial layers of 4H-SiC have been grown on the Si-face of nominally on-axis, n-type substrates using chemical vapor deposition. Vanadium tetrachloride has been used as the V-dopant which is responsible for the high resistivity of the epilayers. 100% 4H-polytype was reproduced in the epilayers using the optimized on-axis growth process. The upper limit of vanadium tetrachloride flow rate was also established to achieve high resistivity epilayers free of 3C polytype inclusion. A resistivity of more than 1 × 105 Ω cm has been achieved in epilayers with a very low concentration of V (1 × 1015 cm−3). Owing to the low concentration of V, superior epilayer structural quality was achieved compared to V-doped and standard high purity semi-insulating bulk grown material of similar resistivity. Epitaxial layers with varying vanadium tetrachloride flow have also been grown to study the influence of V concentration on the polytype stability, structural quality, and optical and electrical properties of epilayers. A clear correspondence has been observed in the flow-rates of vanadium tetrachloride, the atomic concentration of V, and electrical, optical, and structural properties of epilayers." @default.
• W2912481203 created "2019-02-21" @default.
• W2912481203 creator A5009567869 @default.
• W2912481203 creator A5038341913 @default.
• W2912481203 creator A5052840900 @default.
• W2912481203 creator A5061452744 @default.
• W2912481203 creator A5076608514 @default.
• W2912481203 creator A5087679939 @default.
• W2912481203 date "2019-01-25" @default.
• W2912481203 modified "2023-09-27" @default.
• W2912481203 title "CVD growth and properties of on-axis vanadium doped semi-insulating 4H-SiC epilayers" @default.
• W2912481203 cites W1972615988 @default.
• W2912481203 cites W1983311179 @default.
• W2912481203 cites W1986178484 @default.
• W2912481203 cites W1994871392 @default.
• W2912481203 cites W1997559427 @default.
• W2912481203 cites W1999163273 @default.
• W2912481203 cites W2000238101 @default.
• W2912481203 cites W2010187794 @default.
• W2912481203 cites W2025620311 @default.
• W2912481203 cites W2044104116 @default.
• W2912481203 cites W2059754010 @default.
• W2912481203 cites W2069692418 @default.
• W2912481203 cites W2073784605 @default.
• W2912481203 cites W2074120822 @default.
• W2912481203 cites W2076773624 @default.
• W2912481203 cites W2089562367 @default.
• W2912481203 cites W2145733552 @default.
• W2912481203 cites W2147590872 @default.
• W2912481203 cites W2148954705 @default.
• W2912481203 cites W2153293173 @default.
• W2912481203 cites W2520912818 @default.
• W2912481203 cites W2537769627 @default.
• W2912481203 doi "https://doi.org/10.1063/1.5057389" @default.
• W2912481203 hasPublicationYear "2019" @default.
• W2912481203 type Work @default.
• W2912481203 sameAs 2912481203 @default.
• W2912481203 citedByCount "10" @default.
• W2912481203 countsByYear W29124812032019 @default.
• W2912481203 countsByYear W29124812032020 @default.
• W2912481203 countsByYear W29124812032021 @default.
• W2912481203 countsByYear W29124812032022 @default.
• W2912481203 crossrefType "journal-article" @default.
• W2912481203 hasAuthorship W2912481203A5009567869 @default.
• W2912481203 hasAuthorship W2912481203A5038341913 @default.
• W2912481203 hasAuthorship W2912481203A5052840900 @default.
• W2912481203 hasAuthorship W2912481203A5061452744 @default.
• W2912481203 hasAuthorship W2912481203A5076608514 @default.
• W2912481203 hasAuthorship W2912481203A5087679939 @default.
• W2912481203 hasBestOaLocation W29124812032 @default.
• W2912481203 hasConcept C110738630 @default.
• W2912481203 hasConcept C113196181 @default.
• W2912481203 hasConcept C119599485 @default.
• W2912481203 hasConcept C127413603 @default.
• W2912481203 hasConcept C171250308 @default.
• W2912481203 hasConcept C185592680 @default.
• W2912481203 hasConcept C191897082 @default.
• W2912481203 hasConcept C191952053 @default.
• W2912481203 hasConcept C192562407 @default.
• W2912481203 hasConcept C2779227376 @default.
• W2912481203 hasConcept C43617362 @default.
• W2912481203 hasConcept C49040817 @default.
• W2912481203 hasConcept C504678139 @default.
• W2912481203 hasConcept C57410435 @default.
• W2912481203 hasConcept C57863236 @default.
• W2912481203 hasConcept C69990965 @default.
• W2912481203 hasConceptScore W2912481203C110738630 @default.
• W2912481203 hasConceptScore W2912481203C113196181 @default.
• W2912481203 hasConceptScore W2912481203C119599485 @default.
• W2912481203 hasConceptScore W2912481203C127413603 @default.
• W2912481203 hasConceptScore W2912481203C171250308 @default.
• W2912481203 hasConceptScore W2912481203C185592680 @default.
• W2912481203 hasConceptScore W2912481203C191897082 @default.
• W2912481203 hasConceptScore W2912481203C191952053 @default.
• W2912481203 hasConceptScore W2912481203C192562407 @default.
• W2912481203 hasConceptScore W2912481203C2779227376 @default.
• W2912481203 hasConceptScore W2912481203C43617362 @default.
• W2912481203 hasConceptScore W2912481203C49040817 @default.
• W2912481203 hasConceptScore W2912481203C504678139 @default.
• W2912481203 hasConceptScore W2912481203C57410435 @default.
• W2912481203 hasConceptScore W2912481203C57863236 @default.
• W2912481203 hasConceptScore W2912481203C69990965 @default.
• W2912481203 hasFunder F4320322711 @default.
• W2912481203 hasFunder F4320327207 @default.
• W2912481203 hasIssue "4" @default.
• W2912481203 hasLocation W29124812031 @default.
• W2912481203 hasLocation W29124812032 @default.
• W2912481203 hasOpenAccess W2912481203 @default.
• W2912481203 hasPrimaryLocation W29124812031 @default.
• W2912481203 hasRelatedWork W2007481504 @default.
• W2912481203 hasRelatedWork W2007522409 @default.
• W2912481203 hasRelatedWork W2028994635 @default.
• W2912481203 hasRelatedWork W2032745572 @default.
• W2912481203 hasRelatedWork W2035618842 @default.
• W2912481203 hasRelatedWork W2050901158 @default.
• W2912481203 hasRelatedWork W2055518023 @default.
• W2912481203 hasRelatedWork W2341423334 @default.
• W2912481203 hasRelatedWork W2384016035 @default.
• W2912481203 hasRelatedWork W2537769627 @default.
• W2912481203 hasVolume "125" @default.

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