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- W2912484050 endingPage "e201800029" @default.
- W2912484050 startingPage "e201800029" @default.
- W2912484050 abstract "The plasma parameters such as electron density, effective electron temperature, plasma potential, and uniformity are investigated in a new dual-frequency cylindrical inductively coupled plasma (ICP) source operating at two frequencies (2 and 13.56 MHz) and two antennas (a two-turn high-frequency antenna and a six-turn low-frequency (LF) antenna). It is found that the electron density increases with 2 MHz power, whereas the electron temperature and plasma potential decrease with 2 MHz power at a fixed 13.56 MHz power. Moreover, the plasma uniformity can be improved by adjusting the LF power. These results indicate that a dual-frequency synergistic discharge in a cylindrical ICP can produce a high-density, low-potential, low-effective-electron-temperature, and uniform plasma." @default.
- W2912484050 created "2019-02-21" @default.
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- W2912484050 date "2019-02-04" @default.
- W2912484050 modified "2023-09-23" @default.
- W2912484050 title "Characteristics of a dual-radio-frequency cylindrical inductively coupled plasma" @default.
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- W2912484050 doi "https://doi.org/10.1002/ctpp.201800029" @default.
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