FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2912652396> ?p ?o ?g. }

• W2912652396 endingPage "1057" @default.
• W2912652396 startingPage "1057" @default.
• W2912652396 abstract "Zone plate design and efficient methods for the fabrication of zone plates for extreme ultraviolet (EUV) and soft x-ray applications in a newly developed scanning reflection microscope are presented. Based on e-beam lithography, three types of transmission zone plates with focal lengths between 6 and 15&#x00A0;mm are reported: (i)&#x00A0;phase-shifting zone plates made by 190&#x00A0;nm thick PMMA rings on Si3N4 membranes, (ii)&#x00A0;absorbing zone plates made by 75&#x00A0;nm thick Au ring structures on Si3N4, and (iii)&#x00A0;freestanding Au rings of 50&#x00A0;nm thickness and increased transmission in the EUV range. Experiments at the DELTA synchrotron facility reveal a minimum spot size and resulting spatial resolution of 9&#x00B1;3&#x2009;&#x2009;&#x03BC;m, which is the theoretical limit resulting from the synchrotron beam parameters at 60&#x00A0;eV photon energy. Images of a Ti/Si chessboard test pattern are recorded exploiting the energy dependence of the element-specific reflectance." @default.
• W2912652396 created "2019-02-21" @default.
• W2912652396 creator A5003156461 @default.
• W2912652396 creator A5033230192 @default.
• W2912652396 creator A5051155240 @default.
• W2912652396 creator A5061180721 @default.
• W2912652396 creator A5067515985 @default.
• W2912652396 creator A5067533820 @default.
• W2912652396 creator A5087937049 @default.
• W2912652396 creator A5089760121 @default.
• W2912652396 date "2019-01-30" @default.
• W2912652396 modified "2023-10-17" @default.
• W2912652396 title "Fast and easy fabrication methodology of Fresnel zone plates for the extreme ultraviolet and soft x-ray regions" @default.
• W2912652396 cites W1967828814 @default.
• W2912652396 cites W1976869999 @default.
• W2912652396 cites W1979651914 @default.
• W2912652396 cites W2004630075 @default.
• W2912652396 cites W2007022881 @default.
• W2912652396 cites W2007668521 @default.
• W2912652396 cites W2023464912 @default.
• W2912652396 cites W2033481297 @default.
• W2912652396 cites W2053201987 @default.
• W2912652396 cites W2054448151 @default.
• W2912652396 cites W2057152730 @default.
• W2912652396 cites W2061368258 @default.
• W2912652396 cites W2087599743 @default.
• W2912652396 cites W2091564194 @default.
• W2912652396 cites W2109695616 @default.
• W2912652396 cites W2171339126 @default.
• W2912652396 cites W2795178522 @default.
• W2912652396 doi "https://doi.org/10.1364/ao.58.001057" @default.
• W2912652396 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30874156" @default.
• W2912652396 hasPublicationYear "2019" @default.
• W2912652396 type Work @default.
• W2912652396 sameAs 2912652396 @default.
• W2912652396 citedByCount "3" @default.
• W2912652396 countsByYear W29126523962019 @default.
• W2912652396 countsByYear W29126523962022 @default.
• W2912652396 countsByYear W29126523962023 @default.
• W2912652396 crossrefType "journal-article" @default.
• W2912652396 hasAuthorship W2912652396A5003156461 @default.
• W2912652396 hasAuthorship W2912652396A5033230192 @default.
• W2912652396 hasAuthorship W2912652396A5051155240 @default.
• W2912652396 hasAuthorship W2912652396A5061180721 @default.
• W2912652396 hasAuthorship W2912652396A5067515985 @default.
• W2912652396 hasAuthorship W2912652396A5067533820 @default.
• W2912652396 hasAuthorship W2912652396A5087937049 @default.
• W2912652396 hasAuthorship W2912652396A5089760121 @default.
• W2912652396 hasConcept C120665830 @default.
• W2912652396 hasConcept C121332964 @default.
• W2912652396 hasConcept C136525101 @default.
• W2912652396 hasConcept C142724271 @default.
• W2912652396 hasConcept C146024833 @default.
• W2912652396 hasConcept C162996421 @default.
• W2912652396 hasConcept C192562407 @default.
• W2912652396 hasConcept C199360897 @default.
• W2912652396 hasConcept C200292535 @default.
• W2912652396 hasConcept C204223013 @default.
• W2912652396 hasConcept C204787440 @default.
• W2912652396 hasConcept C207114421 @default.
• W2912652396 hasConcept C21368211 @default.
• W2912652396 hasConcept C2779328170 @default.
• W2912652396 hasConcept C32623475 @default.
• W2912652396 hasConcept C35655370 @default.
• W2912652396 hasConcept C41008148 @default.
• W2912652396 hasConcept C49040817 @default.
• W2912652396 hasConcept C520434653 @default.
• W2912652396 hasConcept C65682993 @default.
• W2912652396 hasConcept C71924100 @default.
• W2912652396 hasConceptScore W2912652396C120665830 @default.
• W2912652396 hasConceptScore W2912652396C121332964 @default.
• W2912652396 hasConceptScore W2912652396C136525101 @default.
• W2912652396 hasConceptScore W2912652396C142724271 @default.
• W2912652396 hasConceptScore W2912652396C146024833 @default.
• W2912652396 hasConceptScore W2912652396C162996421 @default.
• W2912652396 hasConceptScore W2912652396C192562407 @default.
• W2912652396 hasConceptScore W2912652396C199360897 @default.
• W2912652396 hasConceptScore W2912652396C200292535 @default.
• W2912652396 hasConceptScore W2912652396C204223013 @default.
• W2912652396 hasConceptScore W2912652396C204787440 @default.
• W2912652396 hasConceptScore W2912652396C207114421 @default.
• W2912652396 hasConceptScore W2912652396C21368211 @default.
• W2912652396 hasConceptScore W2912652396C2779328170 @default.
• W2912652396 hasConceptScore W2912652396C32623475 @default.
• W2912652396 hasConceptScore W2912652396C35655370 @default.
• W2912652396 hasConceptScore W2912652396C41008148 @default.
• W2912652396 hasConceptScore W2912652396C49040817 @default.
• W2912652396 hasConceptScore W2912652396C520434653 @default.
• W2912652396 hasConceptScore W2912652396C65682993 @default.
• W2912652396 hasConceptScore W2912652396C71924100 @default.
• W2912652396 hasFunder F4320307110 @default.
• W2912652396 hasFunder F4320321752 @default.
• W2912652396 hasIssue "4" @default.
• W2912652396 hasLocation W29126523961 @default.
• W2912652396 hasLocation W29126523962 @default.
• W2912652396 hasOpenAccess W2912652396 @default.
• W2912652396 hasPrimaryLocation W29126523961 @default.
• W2912652396 hasRelatedWork W1426717409 @default.

• next