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• W2912656090 startingPage "123" @default.
• W2912656090 abstract "Microscopic structure change induced by microfabrication of Pb(Zr,Ti)O3 (PZT) islands was investigated. The 3 µm-thick epitaxial (100)/(001)-oriented PZT film with Zr/(Zr + Ti) ratio of 0.56 consisted of both tetragonal and the rhombohedral phases. Tetragonal phase mainly existed near the film-substrate interface, while the rhombohedral one near the surface of the film. The profile of this structural non-uniformity along the film thickness was changed by the lateral size of PZT. These phenomena can be explained by the stress distribution in PZT and the understanding of this non-uniformity is the key to control the performance of the devices using PZT." @default.
• W2912656090 created "2019-02-21" @default.
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• W2912656090 date "2019-02-01" @default.
• W2912656090 modified "2023-10-16" @default.
• W2912656090 title "Impact of stress on the crystal structural nonuniformity along the film thickness direction by microfabrication of Pb(Zr,Ti)O₃ islands with morphotropic phase boundary composition" @default.
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• W2912656090 doi "https://doi.org/10.2109/jcersj2.18178" @default.
• W2912656090 hasPublicationYear "2019" @default.
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