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- W2912669529 abstract "This chapter contains sections titled: Introduction Material, processing parameters, and analysis techniques Thermal oxidation in a tungsten lamp furnace combined with a microwave plasma Over-oxidation of N-implanted 4H-SiC Over-oxidation of N-/Al-implanted 4H-SiC Summary References" @default.
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- W2912669529 date "2009-10-21" @default.
- W2912669529 modified "2023-09-27" @default.
- W2912669529 title "Alternative Techniques to Reduce Interface Traps in n-Type 4H-SiC MOS Capacitors" @default.
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- W2912669529 doi "https://doi.org/10.1002/9783527629077.ch8" @default.
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