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- W2912686807 abstract "We present the repeatability performance of automated non-contact on-wafer probing for millimeter-wave and terahertz band applications. Based on the antenna-coupled noncontact probing approach, we incorporated computer control into the existing hardware to automate the test wafer manipulation. A digital microscope with pattern recognition is used to precisely control the alignment of on-wafer antennas at the test ports to minimize positioning repeatability errors. Commercial-off-the-shelf micro-positioners used in our system allow for sub-micron repeatability in device alignment, significantly improving repeatability. Furthermore, the non-contact system does not need vertical translation (conventionally used for probe landing), thus can achieve highly repeatable measurements. The repeatability performance of the automated system presented here is thus limited by the drift of the frequency extenders used." @default.
- W2912686807 created "2019-02-21" @default.
- W2912686807 creator A5015143006 @default.
- W2912686807 date "2019-01-01" @default.
- W2912686807 modified "2023-09-26" @default.
- W2912686807 title "Automated Performance of On-Wafer Calibration and Characterization Using Non-Contact Probes" @default.
- W2912686807 cites W1972886494 @default.
- W2912686807 cites W1978903191 @default.
- W2912686807 cites W1998340256 @default.
- W2912686807 cites W2077531038 @default.
- W2912686807 cites W2102662922 @default.
- W2912686807 cites W2103405668 @default.
- W2912686807 cites W2127492122 @default.
- W2912686807 cites W2145856761 @default.
- W2912686807 cites W2321875928 @default.
- W2912686807 cites W2510466684 @default.
- W2912686807 cites W2543006557 @default.
- W2912686807 doi "https://doi.org/10.1109/arftg.2019.8637236" @default.
- W2912686807 hasPublicationYear "2019" @default.
- W2912686807 type Work @default.
- W2912686807 sameAs 2912686807 @default.
- W2912686807 citedByCount "1" @default.
- W2912686807 countsByYear W29126868072022 @default.
- W2912686807 crossrefType "proceedings-article" @default.
- W2912686807 hasAuthorship W2912686807A5015143006 @default.
- W2912686807 hasConcept C104317684 @default.
- W2912686807 hasConcept C105580179 @default.
- W2912686807 hasConcept C121332964 @default.
- W2912686807 hasConcept C127413603 @default.
- W2912686807 hasConcept C149364088 @default.
- W2912686807 hasConcept C154020017 @default.
- W2912686807 hasConcept C160671074 @default.
- W2912686807 hasConcept C165838908 @default.
- W2912686807 hasConcept C185592680 @default.
- W2912686807 hasConcept C192562407 @default.
- W2912686807 hasConcept C24326235 @default.
- W2912686807 hasConcept C41008148 @default.
- W2912686807 hasConcept C43617362 @default.
- W2912686807 hasConcept C44445679 @default.
- W2912686807 hasConcept C49040817 @default.
- W2912686807 hasConcept C55493867 @default.
- W2912686807 hasConcept C62520636 @default.
- W2912686807 hasConceptScore W2912686807C104317684 @default.
- W2912686807 hasConceptScore W2912686807C105580179 @default.
- W2912686807 hasConceptScore W2912686807C121332964 @default.
- W2912686807 hasConceptScore W2912686807C127413603 @default.
- W2912686807 hasConceptScore W2912686807C149364088 @default.
- W2912686807 hasConceptScore W2912686807C154020017 @default.
- W2912686807 hasConceptScore W2912686807C160671074 @default.
- W2912686807 hasConceptScore W2912686807C165838908 @default.
- W2912686807 hasConceptScore W2912686807C185592680 @default.
- W2912686807 hasConceptScore W2912686807C192562407 @default.
- W2912686807 hasConceptScore W2912686807C24326235 @default.
- W2912686807 hasConceptScore W2912686807C41008148 @default.
- W2912686807 hasConceptScore W2912686807C43617362 @default.
- W2912686807 hasConceptScore W2912686807C44445679 @default.
- W2912686807 hasConceptScore W2912686807C49040817 @default.
- W2912686807 hasConceptScore W2912686807C55493867 @default.
- W2912686807 hasConceptScore W2912686807C62520636 @default.
- W2912686807 hasLocation W29126868071 @default.
- W2912686807 hasOpenAccess W2912686807 @default.
- W2912686807 hasPrimaryLocation W29126868071 @default.
- W2912686807 hasRelatedWork W1523615001 @default.
- W2912686807 hasRelatedWork W1579848220 @default.
- W2912686807 hasRelatedWork W2008743393 @default.
- W2912686807 hasRelatedWork W2072984997 @default.
- W2912686807 hasRelatedWork W2148783093 @default.
- W2912686807 hasRelatedWork W2149835836 @default.
- W2912686807 hasRelatedWork W2539537318 @default.
- W2912686807 hasRelatedWork W2580796801 @default.
- W2912686807 hasRelatedWork W2782878556 @default.
- W2912686807 hasRelatedWork W2943341812 @default.
- W2912686807 isParatext "false" @default.
- W2912686807 isRetracted "false" @default.
- W2912686807 magId "2912686807" @default.
- W2912686807 workType "article" @default.