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- W2912844040 abstract "The paper presents a complete methodology for combined MEMS-IC robustness optimization, in consideration of electrical and mechanical design and process parameters. The demonstrator example is a MEMS accelerometer with detection circuit. The mechanical process parameters are based on industrial process data and have a strong impact on the sensor performance features. A successful optimization requires the simultaneous inclusion of design parameters and process tolerances from both energy domains. The optimization flow supports parallel simulation. The efficiency of the flow is maximized by updating the MEMS model only when necessary." @default.
- W2912844040 created "2019-02-21" @default.
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- W2912844040 date "2018-12-01" @default.
- W2912844040 modified "2023-09-27" @default.
- W2912844040 title "MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side" @default.
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- W2912844040 doi "https://doi.org/10.1109/icecs.2018.8617959" @default.
- W2912844040 hasPublicationYear "2018" @default.
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