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- W2912844565 abstract "Approximately 13 nm thick HfO2 films are grown on Si wafers by atomic layer deposition under different ozone concentrations at 280 °C using Hf[N(Et)(Me)]4 as Hf precursor." @default.
- W2912844565 created "2019-02-21" @default.
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- W2912844565 date "2012-10-30" @default.
- W2912844565 modified "2023-10-17" @default.
- W2912844565 title "ChemInform Abstract: Stabilization of Tetragonal HfO2under Low Active Oxygen Source Environment in Atomic Layer Deposition." @default.
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- W2912844565 doi "https://doi.org/10.1002/chin.201247020" @default.
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