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- W2912902773 abstract "In this work, we report the effect of stress generated in a photo-resist film during micro lithography sequence and its impact on selective electro plating process. Series of experiments were carried out to find an optimum pre-bake temperature which resulted in more control over stress generated in the photo-resist film and hence seepage free smooth plating process." @default.
- W2912902773 created "2019-02-21" @default.
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- W2912902773 date "2019-01-01" @default.
- W2912902773 modified "2023-10-17" @default.
- W2912902773 title "Thermal Control of Stress in Photoresist Film for Improving Selectivity in Electro-Plating Process" @default.
- W2912902773 doi "https://doi.org/10.1007/978-3-319-97604-4_41" @default.
- W2912902773 hasPublicationYear "2019" @default.
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