Matches in SemOpenAlex for { <https://semopenalex.org/work/W2912983941> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2912983941 endingPage "051009" @default.
- W2912983941 startingPage "051009" @default.
- W2912983941 abstract "Diffusion equations were solved to examine how the aluminum concentration in 4H-SiC grown on a trenched substrate is influenced by the Gibbs−Thomson (GT) effect. The GT effect increases or decreases the equilibrium gas-phase concentration of growing species in the vicinity of the top or bottom of the trench, respectively, which results in a part of the incident growing species, excluding the central area of the trench, diffusing inward. After fitting activity coefficient of a conditional constituent AlC in solid solution AlSiC and surface free energy of 4H-SiC, we determined the aluminum fluxes toward the top and bottom in such a way that the flux ratio of aluminum to silicon equals the AlC mole fraction at the top () and bottom (), respectively. Calculated was lower than and almost agreed with the measured in filled trenches, showing the GT effect on AlC being weaker than that on SiC." @default.
- W2912983941 created "2019-02-21" @default.
- W2912983941 creator A5040140134 @default.
- W2912983941 creator A5051614581 @default.
- W2912983941 creator A5060785625 @default.
- W2912983941 creator A5066173979 @default.
- W2912983941 creator A5069833444 @default.
- W2912983941 creator A5074718916 @default.
- W2912983941 date "2019-04-10" @default.
- W2912983941 modified "2023-09-25" @default.
- W2912983941 title "Gibbs–Thomson effect on aluminum doping during trench-filling epitaxial growth of 4H-SiC" @default.
- W2912983941 cites W1973279362 @default.
- W2912983941 cites W1994371420 @default.
- W2912983941 cites W2028694681 @default.
- W2912983941 cites W2030800277 @default.
- W2912983941 cites W2050063283 @default.
- W2912983941 cites W2083671595 @default.
- W2912983941 cites W2088632812 @default.
- W2912983941 cites W2093862840 @default.
- W2912983941 cites W2115385429 @default.
- W2912983941 cites W2120952817 @default.
- W2912983941 cites W2127058611 @default.
- W2912983941 cites W2130504877 @default.
- W2912983941 cites W2142155217 @default.
- W2912983941 cites W2244508154 @default.
- W2912983941 cites W2264568742 @default.
- W2912983941 cites W2325930694 @default.
- W2912983941 cites W2494106695 @default.
- W2912983941 cites W2613386393 @default.
- W2912983941 cites W4245755231 @default.
- W2912983941 doi "https://doi.org/10.7567/1347-4065/ab0342" @default.
- W2912983941 hasPublicationYear "2019" @default.
- W2912983941 type Work @default.
- W2912983941 sameAs 2912983941 @default.
- W2912983941 citedByCount "1" @default.
- W2912983941 countsByYear W29129839412022 @default.
- W2912983941 crossrefType "journal-article" @default.
- W2912983941 hasAuthorship W2912983941A5040140134 @default.
- W2912983941 hasAuthorship W2912983941A5051614581 @default.
- W2912983941 hasAuthorship W2912983941A5060785625 @default.
- W2912983941 hasAuthorship W2912983941A5066173979 @default.
- W2912983941 hasAuthorship W2912983941A5069833444 @default.
- W2912983941 hasAuthorship W2912983941A5074718916 @default.
- W2912983941 hasConcept C110738630 @default.
- W2912983941 hasConcept C121332964 @default.
- W2912983941 hasConcept C155310634 @default.
- W2912983941 hasConcept C171250308 @default.
- W2912983941 hasConcept C191897082 @default.
- W2912983941 hasConcept C192562407 @default.
- W2912983941 hasConcept C26873012 @default.
- W2912983941 hasConcept C2779227376 @default.
- W2912983941 hasConcept C49040817 @default.
- W2912983941 hasConcept C513153333 @default.
- W2912983941 hasConcept C57863236 @default.
- W2912983941 hasConcept C61696701 @default.
- W2912983941 hasConceptScore W2912983941C110738630 @default.
- W2912983941 hasConceptScore W2912983941C121332964 @default.
- W2912983941 hasConceptScore W2912983941C155310634 @default.
- W2912983941 hasConceptScore W2912983941C171250308 @default.
- W2912983941 hasConceptScore W2912983941C191897082 @default.
- W2912983941 hasConceptScore W2912983941C192562407 @default.
- W2912983941 hasConceptScore W2912983941C26873012 @default.
- W2912983941 hasConceptScore W2912983941C2779227376 @default.
- W2912983941 hasConceptScore W2912983941C49040817 @default.
- W2912983941 hasConceptScore W2912983941C513153333 @default.
- W2912983941 hasConceptScore W2912983941C57863236 @default.
- W2912983941 hasConceptScore W2912983941C61696701 @default.
- W2912983941 hasIssue "5" @default.
- W2912983941 hasLocation W29129839411 @default.
- W2912983941 hasOpenAccess W2912983941 @default.
- W2912983941 hasPrimaryLocation W29129839411 @default.
- W2912983941 hasRelatedWork W1987425020 @default.
- W2912983941 hasRelatedWork W1998621903 @default.
- W2912983941 hasRelatedWork W2039580016 @default.
- W2912983941 hasRelatedWork W2072100342 @default.
- W2912983941 hasRelatedWork W2743194952 @default.
- W2912983941 hasRelatedWork W2774293966 @default.
- W2912983941 hasRelatedWork W3033188224 @default.
- W2912983941 hasRelatedWork W3046099328 @default.
- W2912983941 hasRelatedWork W3159386921 @default.
- W2912983941 hasRelatedWork W4233728795 @default.
- W2912983941 hasVolume "58" @default.
- W2912983941 isParatext "false" @default.
- W2912983941 isRetracted "false" @default.
- W2912983941 magId "2912983941" @default.
- W2912983941 workType "article" @default.