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- W2913420550 abstract "The atomic structure of nitrogen at the SiO 2 /4H-SiC(0001) interface has been investigated using X-ray absorption spectroscopy (XAS) in two nitric oxide annealed samples, one of which was oxidized in dry O 2 (NO-POA) prior to the experiment. The peak shapes and energies of the observed and simulated spectra are in agreement and indicate that the N-containing sites could be the substitutional C site at the interface for the NO-annealed sample and the interstitial site in the interior of SiC for the NO–POA-annealed sample. XAS analysis distinguished between the N-containing sites at the SiO 2 /SiC interface." @default.
- W2913420550 created "2019-02-21" @default.
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- W2913420550 date "2019-02-15" @default.
- W2913420550 modified "2023-09-27" @default.
- W2913420550 title "Distinguishing nitrogen-containing sites in SiO<sub>2</sub>/4H-SiC(0001) after nitric oxide annealing by X-ray absorption spectroscopy" @default.
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- W2913420550 doi "https://doi.org/10.1107/s1600577519001504" @default.
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