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• W2913644499 endingPage "2558" @default.
• W2913644499 startingPage "2544" @default.
• W2913644499 abstract "Microwave (MW) activated H2/Ar (and H2/Kr) plasmas operating under powers and pressures relevant to diamond chemical vapor deposition have been investigated experimentally and by 2-D modeling. The experiments return spatially and wavelength resolved optical emission spectra of electronically excited H2 molecules and H and Ar(/Kr) atoms for a range of H2/noble gas mixing ratios. The self-consistent 2-D(r, z) modeling of different H2/Ar gas mixtures includes calculations of the MW electromagnetic fields, the plasma chemistry and electron kinetics, heat and species transfer and gas–surface interactions. Comparison with the trends revealed by the spatially resolved optical emission measurements and their variations with changes in process conditions help guide identification and refinement of the dominant plasma (and plasma emission) generation mechanisms and the more important Ar–H, Ar–H2, and H–H2 coupling reactions. Noble gas addition is shown to encourage radial expansion of the plasma, and thus to improve the uniformity of the H atom concentration and the gas temperature just above the substrate. Noble gas addition in the current experiments is also found to enhance (unwanted) sputtering of the copper base plate of the reactor; the experimentally observed increase in gas phase Cu* emission is shown to correlate with the near substrate ArH+ (and KrH+) ion concentrations returned by the modeling, rather than with the relatively more abundant H3+ (and H3O+) ions." @default.
• W2913644499 created "2019-02-21" @default.
• W2913644499 creator A5013376926 @default.
• W2913644499 creator A5019743038 @default.
• W2913644499 creator A5050290744 @default.
• W2913644499 creator A5062231954 @default.
• W2913644499 date "2019-03-11" @default.
• W2913644499 modified "2023-09-30" @default.
• W2913644499 title "Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H₂/Ar and H₂/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition" @default.
• W2913644499 cites W1554902779 @default.
• W2913644499 cites W1560599754 @default.
• W2913644499 cites W1587535920 @default.
• W2913644499 cites W1650365336 @default.
• W2913644499 cites W1652041930 @default.
• W2913644499 cites W1974678952 @default.
• W2913644499 cites W1981356974 @default.
• W2913644499 cites W1986604949 @default.
• W2913644499 cites W1987681070 @default.
• W2913644499 cites W1993083910 @default.
• W2913644499 cites W1999510667 @default.
• W2913644499 cites W2001307133 @default.
• W2913644499 cites W2004170261 @default.
• W2913644499 cites W2008645555 @default.
• W2913644499 cites W2017658663 @default.
• W2913644499 cites W2017871928 @default.
• W2913644499 cites W2018266149 @default.
• W2913644499 cites W2025531338 @default.
• W2913644499 cites W2027482840 @default.
• W2913644499 cites W2036267434 @default.
• W2913644499 cites W2055414011 @default.
• W2913644499 cites W2055635774 @default.
• W2913644499 cites W2061961086 @default.
• W2913644499 cites W2065001261 @default.
• W2913644499 cites W2069037437 @default.
• W2913644499 cites W2072661877 @default.
• W2913644499 cites W2075524246 @default.
• W2913644499 cites W2086355811 @default.
• W2913644499 cites W2087207075 @default.
• W2913644499 cites W2094605682 @default.
• W2913644499 cites W2125827949 @default.
• W2913644499 cites W2126320683 @default.
• W2913644499 cites W2140361452 @default.
• W2913644499 cites W2144134163 @default.
• W2913644499 cites W2159753973 @default.
• W2913644499 cites W2526359637 @default.
• W2913644499 cites W2600354602 @default.
• W2913644499 cites W2805641303 @default.
• W2913644499 cites W2894509061 @default.
• W2913644499 cites W2912319709 @default.
• W2913644499 cites W4210519049 @default.
• W2913644499 cites W4236327415 @default.
• W2913644499 doi "https://doi.org/10.1021/acs.jpca.8b12294" @default.
• W2913644499 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30852899" @default.
• W2913644499 hasPublicationYear "2019" @default.
• W2913644499 type Work @default.
• W2913644499 sameAs 2913644499 @default.
• W2913644499 citedByCount "8" @default.
• W2913644499 countsByYear W29136444992019 @default.
• W2913644499 countsByYear W29136444992020 @default.
• W2913644499 countsByYear W29136444992021 @default.
• W2913644499 countsByYear W29136444992022 @default.
• W2913644499 countsByYear W29136444992023 @default.
• W2913644499 crossrefType "journal-article" @default.
• W2913644499 hasAuthorship W2913644499A5013376926 @default.
• W2913644499 hasAuthorship W2913644499A5019743038 @default.
• W2913644499 hasAuthorship W2913644499A5050290744 @default.
• W2913644499 hasAuthorship W2913644499A5062231954 @default.
• W2913644499 hasBestOaLocation W29136444992 @default.
• W2913644499 hasConcept C111368507 @default.
• W2913644499 hasConcept C113196181 @default.
• W2913644499 hasConcept C121332964 @default.
• W2913644499 hasConcept C121530826 @default.
• W2913644499 hasConcept C127313418 @default.
• W2913644499 hasConcept C145148216 @default.
• W2913644499 hasConcept C168566512 @default.
• W2913644499 hasConcept C171250308 @default.
• W2913644499 hasConcept C178790620 @default.
• W2913644499 hasConcept C181500209 @default.
• W2913644499 hasConcept C184779094 @default.
• W2913644499 hasConcept C185592680 @default.
• W2913644499 hasConcept C19067145 @default.
• W2913644499 hasConcept C192562407 @default.
• W2913644499 hasConcept C22423302 @default.
• W2913644499 hasConcept C2776921476 @default.
• W2913644499 hasConcept C2777289219 @default.
• W2913644499 hasConcept C43617362 @default.
• W2913644499 hasConcept C44838205 @default.
• W2913644499 hasConcept C62520636 @default.
• W2913644499 hasConcept C82706917 @default.
• W2913644499 hasConceptScore W2913644499C111368507 @default.
• W2913644499 hasConceptScore W2913644499C113196181 @default.
• W2913644499 hasConceptScore W2913644499C121332964 @default.
• W2913644499 hasConceptScore W2913644499C121530826 @default.
• W2913644499 hasConceptScore W2913644499C127313418 @default.
• W2913644499 hasConceptScore W2913644499C145148216 @default.
• W2913644499 hasConceptScore W2913644499C168566512 @default.
• W2913644499 hasConceptScore W2913644499C171250308 @default.
• W2913644499 hasConceptScore W2913644499C178790620 @default.

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