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- W2913686717 endingPage "85" @default.
- W2913686717 startingPage "85" @default.
- W2913686717 abstract "Growing demands for affordable, portable, and reliable optical microendoscopic imaging devices are attracting research institutes and industries to find new manufacturing methods. However, the integration of microscopic components into these subsystems is one of today’s challenges in manufacturing and packaging. Together with this kind of miniaturization more and more functional parts have to be accommodated in ever smaller spaces. Therefore, solving this challenge with the use of microelectromechanical systems (MEMS) fabrication technology has opened the promising opportunities in enabling a wide variety of novel optical microendoscopy to be miniaturized. MEMS fabrication technology enables abilities to apply batch fabrication methods with high-precision and to include a wide variety of optical functionalities to the optical components. As a result, MEMS technology has enabled greater accessibility to advance optical microendoscopy technology to provide high-resolution and high-performance imaging matching with traditional table-top microscopy. In this review the latest advancements of MEMS actuators for optical microendoscopy will be discussed in detail." @default.
- W2913686717 created "2019-02-21" @default.
- W2913686717 creator A5046132182 @default.
- W2913686717 creator A5082268195 @default.
- W2913686717 date "2019-01-24" @default.
- W2913686717 modified "2023-10-04" @default.
- W2913686717 title "MEMS Actuators for Optical Microendoscopy" @default.
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- W2913686717 doi "https://doi.org/10.3390/mi10020085" @default.