Matches in SemOpenAlex for { <https://semopenalex.org/work/W2913921687> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2913921687 endingPage "198" @default.
- W2913921687 startingPage "191" @default.
- W2913921687 abstract "GaN/AlGaN based High Electron Mobility Transistors (HEMTs) are being widely developed and used for variety of microwave power applications due to their superior electron transport properties. In the present study, effect of HCl pre-metal dip followed by low power Argon (Ar) plasma exposure for fixed time is studied, during HEMT fabrication, and reported. The electrical characterization of the source/drain ohmic contacts is carried out using circular Transmission Line Model (c-TLM) method. The surface morphology and the structural analysis of the contacts are evaluated using XRD, SEM, AFM and SIMS. Ti/Al based metal systems displayed lower contact resistance and increase in device current values Ids when exposed to Ar plasma. The improvement of Rc values is correlated to lowering of barrier height as indicated by XPS analysis. This is mainly due to preferential sputtering of N during Ar plasma treatment that creates N vacancies on GaN surface increasing surface doping concentration suitable for ohmic contacts. Hence Ar plasma treatment along with HCl pre-metal dip facilitates achieving lower contact resistance of ohmic contacts." @default.
- W2913921687 created "2019-02-21" @default.
- W2913921687 creator A5008811657 @default.
- W2913921687 creator A5016966260 @default.
- W2913921687 creator A5026917011 @default.
- W2913921687 creator A5045290590 @default.
- W2913921687 creator A5055658951 @default.
- W2913921687 creator A5090317453 @default.
- W2913921687 creator A5090559562 @default.
- W2913921687 date "2019-01-01" @default.
- W2913921687 modified "2023-09-23" @default.
- W2913921687 title "Effect of Argon Plasma Treatment on Ohmic Contact Formation in AlGaN/GaN HEMTs" @default.
- W2913921687 cites W1963570525 @default.
- W2913921687 cites W1974835566 @default.
- W2913921687 cites W1978025846 @default.
- W2913921687 cites W1980593472 @default.
- W2913921687 cites W1981918025 @default.
- W2913921687 cites W1983899757 @default.
- W2913921687 cites W1985665529 @default.
- W2913921687 cites W1996953895 @default.
- W2913921687 cites W2004036555 @default.
- W2913921687 cites W2017076333 @default.
- W2913921687 cites W2020627146 @default.
- W2913921687 cites W2037054209 @default.
- W2913921687 cites W2068276858 @default.
- W2913921687 cites W2076805406 @default.
- W2913921687 cites W2085917678 @default.
- W2913921687 cites W2094111149 @default.
- W2913921687 cites W2114902077 @default.
- W2913921687 cites W2148954705 @default.
- W2913921687 cites W574456350 @default.
- W2913921687 doi "https://doi.org/10.1007/978-3-319-97604-4_30" @default.
- W2913921687 hasPublicationYear "2019" @default.
- W2913921687 type Work @default.
- W2913921687 sameAs 2913921687 @default.
- W2913921687 citedByCount "1" @default.
- W2913921687 countsByYear W29139216872021 @default.
- W2913921687 crossrefType "book-chapter" @default.
- W2913921687 hasAuthorship W2913921687A5008811657 @default.
- W2913921687 hasAuthorship W2913921687A5016966260 @default.
- W2913921687 hasAuthorship W2913921687A5026917011 @default.
- W2913921687 hasAuthorship W2913921687A5045290590 @default.
- W2913921687 hasAuthorship W2913921687A5055658951 @default.
- W2913921687 hasAuthorship W2913921687A5090317453 @default.
- W2913921687 hasAuthorship W2913921687A5090559562 @default.
- W2913921687 hasConcept C121332964 @default.
- W2913921687 hasConcept C138230450 @default.
- W2913921687 hasConcept C171250308 @default.
- W2913921687 hasConcept C184779094 @default.
- W2913921687 hasConcept C185544564 @default.
- W2913921687 hasConcept C192562407 @default.
- W2913921687 hasConcept C2779227376 @default.
- W2913921687 hasConcept C49040817 @default.
- W2913921687 hasConcept C547737533 @default.
- W2913921687 hasConcept C82706917 @default.
- W2913921687 hasConceptScore W2913921687C121332964 @default.
- W2913921687 hasConceptScore W2913921687C138230450 @default.
- W2913921687 hasConceptScore W2913921687C171250308 @default.
- W2913921687 hasConceptScore W2913921687C184779094 @default.
- W2913921687 hasConceptScore W2913921687C185544564 @default.
- W2913921687 hasConceptScore W2913921687C192562407 @default.
- W2913921687 hasConceptScore W2913921687C2779227376 @default.
- W2913921687 hasConceptScore W2913921687C49040817 @default.
- W2913921687 hasConceptScore W2913921687C547737533 @default.
- W2913921687 hasConceptScore W2913921687C82706917 @default.
- W2913921687 hasLocation W29139216871 @default.
- W2913921687 hasOpenAccess W2913921687 @default.
- W2913921687 hasPrimaryLocation W29139216871 @default.
- W2913921687 hasRelatedWork W165327457 @default.
- W2913921687 hasRelatedWork W2012828785 @default.
- W2913921687 hasRelatedWork W2026846488 @default.
- W2913921687 hasRelatedWork W2058676402 @default.
- W2913921687 hasRelatedWork W2103105787 @default.
- W2913921687 hasRelatedWork W2138902184 @default.
- W2913921687 hasRelatedWork W2148642783 @default.
- W2913921687 hasRelatedWork W2752947955 @default.
- W2913921687 hasRelatedWork W2902546961 @default.
- W2913921687 hasRelatedWork W4297796452 @default.
- W2913921687 isParatext "false" @default.
- W2913921687 isRetracted "false" @default.
- W2913921687 magId "2913921687" @default.
- W2913921687 workType "book-chapter" @default.