Matches in SemOpenAlex for { <https://semopenalex.org/work/W2914470746> ?p ?o ?g. }
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- W2914470746 endingPage "742" @default.
- W2914470746 startingPage "731" @default.
- W2914470746 abstract "This paper reports the aluminum nitride (AlN) based piezoelectric MEMS acoustic sensor for aeroacoustic applications. The acoustic sensor reported, is square diaphragm based, which is easy to fabricate. Thin film AlN is considered as the sensing layer to exploit the property of CMOS process compatibility. The structure dimensions are chosen to have the cut-on, cut-off and resonance frequency of 20 Hz, 10 kHz and 45 kHz respectively. The sensitivity of the sensor is 103 and 84 µv/Pa in case of central and outer annular electrode pattern respectively. Furthermore a generic lumped model of square diaphragm based acoustic sensor is also reported. The results thus obtained from lumped model simulation using MULTISIM 13.0 and distributed model simulation using Comsol-Multiphysics are in good agreement with the experimentally obtained results, which validates the lumped model of the square diaphragm based acoustic sensor." @default.
- W2914470746 created "2019-02-21" @default.
- W2914470746 creator A5011178994 @default.
- W2914470746 creator A5014199984 @default.
- W2914470746 creator A5024308997 @default.
- W2914470746 creator A5054919672 @default.
- W2914470746 creator A5084040038 @default.
- W2914470746 date "2019-01-01" @default.
- W2914470746 modified "2023-09-23" @default.
- W2914470746 title "Design, Modeling and Simulation of Square Diaphragm Based, Piezoelectric (AlN) MEMS Acoustic Sensor for High SPL Measurements" @default.
- W2914470746 cites W1481323362 @default.
- W2914470746 cites W1981890625 @default.
- W2914470746 cites W2033562417 @default.
- W2914470746 cites W2067494064 @default.
- W2914470746 cites W2088585322 @default.
- W2914470746 cites W2140807890 @default.
- W2914470746 cites W2152556462 @default.
- W2914470746 cites W2156270368 @default.
- W2914470746 cites W3212364698 @default.
- W2914470746 doi "https://doi.org/10.1007/978-3-319-97604-4_112" @default.
- W2914470746 hasPublicationYear "2019" @default.
- W2914470746 type Work @default.
- W2914470746 sameAs 2914470746 @default.
- W2914470746 citedByCount "0" @default.
- W2914470746 crossrefType "book-chapter" @default.
- W2914470746 hasAuthorship W2914470746A5011178994 @default.
- W2914470746 hasAuthorship W2914470746A5014199984 @default.
- W2914470746 hasAuthorship W2914470746A5024308997 @default.
- W2914470746 hasAuthorship W2914470746A5054919672 @default.
- W2914470746 hasAuthorship W2914470746A5084040038 @default.
- W2914470746 hasConcept C100082104 @default.
- W2914470746 hasConcept C121332964 @default.
- W2914470746 hasConcept C127413603 @default.
- W2914470746 hasConcept C135692309 @default.
- W2914470746 hasConcept C159985019 @default.
- W2914470746 hasConcept C164292776 @default.
- W2914470746 hasConcept C192562407 @default.
- W2914470746 hasConcept C198394728 @default.
- W2914470746 hasConcept C24326235 @default.
- W2914470746 hasConcept C24890656 @default.
- W2914470746 hasConcept C2524010 @default.
- W2914470746 hasConcept C33923547 @default.
- W2914470746 hasConcept C37977207 @default.
- W2914470746 hasConcept C49040817 @default.
- W2914470746 hasConcept C66938386 @default.
- W2914470746 hasConceptScore W2914470746C100082104 @default.
- W2914470746 hasConceptScore W2914470746C121332964 @default.
- W2914470746 hasConceptScore W2914470746C127413603 @default.
- W2914470746 hasConceptScore W2914470746C135692309 @default.
- W2914470746 hasConceptScore W2914470746C159985019 @default.
- W2914470746 hasConceptScore W2914470746C164292776 @default.
- W2914470746 hasConceptScore W2914470746C192562407 @default.
- W2914470746 hasConceptScore W2914470746C198394728 @default.
- W2914470746 hasConceptScore W2914470746C24326235 @default.
- W2914470746 hasConceptScore W2914470746C24890656 @default.
- W2914470746 hasConceptScore W2914470746C2524010 @default.
- W2914470746 hasConceptScore W2914470746C33923547 @default.
- W2914470746 hasConceptScore W2914470746C37977207 @default.
- W2914470746 hasConceptScore W2914470746C49040817 @default.
- W2914470746 hasConceptScore W2914470746C66938386 @default.
- W2914470746 hasLocation W29144707461 @default.
- W2914470746 hasOpenAccess W2914470746 @default.
- W2914470746 hasPrimaryLocation W29144707461 @default.
- W2914470746 hasRelatedWork W2030024880 @default.
- W2914470746 hasRelatedWork W2048642477 @default.
- W2914470746 hasRelatedWork W2314758319 @default.
- W2914470746 hasRelatedWork W2317795641 @default.
- W2914470746 hasRelatedWork W2392123276 @default.
- W2914470746 hasRelatedWork W2394315352 @default.
- W2914470746 hasRelatedWork W2744166658 @default.
- W2914470746 hasRelatedWork W2890764238 @default.
- W2914470746 hasRelatedWork W4251774925 @default.
- W2914470746 hasRelatedWork W2260890377 @default.
- W2914470746 isParatext "false" @default.
- W2914470746 isRetracted "false" @default.
- W2914470746 magId "2914470746" @default.
- W2914470746 workType "book-chapter" @default.