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• W2915060219 abstract "The paper presents details of the fabricating technology of nanoscale mechanical resonators based on suspended silicon nanowires. The structures were made from silicon on insulator material, the thickness of the upper layer of silicon is 110 nm, the thickness of silicon oxide is 200 nm. Fabrication process contains standard CMOS compatible technologies only: Electron lithography with positive resist, reactive ion and liquid etching, electron beam deposition of thin films. The presented structures can be used as sensors of mass, displacement, acceleration, pressure with extremely high sensitivity." @default.
• W2915060219 created "2019-02-21" @default.
• W2915060219 creator A5001526034 @default.
• W2915060219 creator A5006041451 @default.
• W2915060219 creator A5016289356 @default.
• W2915060219 creator A5017491617 @default.
• W2915060219 creator A5019038143 @default.
• W2915060219 creator A5032491276 @default.
• W2915060219 creator A5036225503 @default.
• W2915060219 date "2019-03-15" @default.
• W2915060219 modified "2023-09-27" @default.
• W2915060219 title "Silicon nanobridge as a high quality mechanical resonator" @default.
• W2915060219 cites W1503154855 @default.
• W2915060219 cites W1970737244 @default.
• W2915060219 cites W1975481539 @default.
• W2915060219 cites W1982991836 @default.
• W2915060219 cites W1995314372 @default.
• W2915060219 cites W1998885047 @default.
• W2915060219 cites W2018886977 @default.
• W2915060219 cites W2042800207 @default.
• W2915060219 cites W2044574928 @default.
• W2915060219 cites W206065491 @default.
• W2915060219 cites W2069853791 @default.
• W2915060219 cites W2083553307 @default.
• W2915060219 cites W2099391088 @default.
• W2915060219 cites W2105907384 @default.
• W2915060219 cites W2118188762 @default.
• W2915060219 cites W2161094664 @default.
• W2915060219 cites W2601740347 @default.
• W2915060219 cites W2607242139 @default.
• W2915060219 cites W2771633626 @default.
• W2915060219 cites W2891340387 @default.
• W2915060219 cites W3106306560 @default.
• W2915060219 cites W4246622014 @default.
• W2915060219 cites W4292487398 @default.
• W2915060219 doi "https://doi.org/10.1117/12.2521034" @default.
• W2915060219 hasPublicationYear "2019" @default.
• W2915060219 type Work @default.
• W2915060219 sameAs 2915060219 @default.
• W2915060219 citedByCount "0" @default.
• W2915060219 crossrefType "proceedings-article" @default.
• W2915060219 hasAuthorship W2915060219A5001526034 @default.
• W2915060219 hasAuthorship W2915060219A5006041451 @default.
• W2915060219 hasAuthorship W2915060219A5016289356 @default.
• W2915060219 hasAuthorship W2915060219A5017491617 @default.
• W2915060219 hasAuthorship W2915060219A5019038143 @default.
• W2915060219 hasAuthorship W2915060219A5032491276 @default.
• W2915060219 hasAuthorship W2915060219A5036225503 @default.
• W2915060219 hasBestOaLocation W29150602192 @default.
• W2915060219 hasConcept C100460472 @default.
• W2915060219 hasConcept C130472188 @default.
• W2915060219 hasConcept C136525101 @default.
• W2915060219 hasConcept C142724271 @default.
• W2915060219 hasConcept C171250308 @default.
• W2915060219 hasConcept C192562407 @default.
• W2915060219 hasConcept C200274948 @default.
• W2915060219 hasConcept C204223013 @default.
• W2915060219 hasConcept C204787440 @default.
• W2915060219 hasConcept C2779227376 @default.
• W2915060219 hasConcept C49040817 @default.
• W2915060219 hasConcept C53143962 @default.
• W2915060219 hasConcept C53524968 @default.
• W2915060219 hasConcept C544956773 @default.
• W2915060219 hasConcept C71924100 @default.
• W2915060219 hasConcept C97126364 @default.
• W2915060219 hasConceptScore W2915060219C100460472 @default.
• W2915060219 hasConceptScore W2915060219C130472188 @default.
• W2915060219 hasConceptScore W2915060219C136525101 @default.
• W2915060219 hasConceptScore W2915060219C142724271 @default.
• W2915060219 hasConceptScore W2915060219C171250308 @default.
• W2915060219 hasConceptScore W2915060219C192562407 @default.
• W2915060219 hasConceptScore W2915060219C200274948 @default.
• W2915060219 hasConceptScore W2915060219C204223013 @default.
• W2915060219 hasConceptScore W2915060219C204787440 @default.
• W2915060219 hasConceptScore W2915060219C2779227376 @default.
• W2915060219 hasConceptScore W2915060219C49040817 @default.
• W2915060219 hasConceptScore W2915060219C53143962 @default.
• W2915060219 hasConceptScore W2915060219C53524968 @default.
• W2915060219 hasConceptScore W2915060219C544956773 @default.
• W2915060219 hasConceptScore W2915060219C71924100 @default.
• W2915060219 hasConceptScore W2915060219C97126364 @default.
• W2915060219 hasLocation W29150602191 @default.
• W2915060219 hasLocation W29150602192 @default.
• W2915060219 hasOpenAccess W2915060219 @default.
• W2915060219 hasPrimaryLocation W29150602191 @default.
• W2915060219 hasRelatedWork W1840625940 @default.
• W2915060219 hasRelatedWork W1991627955 @default.
• W2915060219 hasRelatedWork W2045008919 @default.
• W2915060219 hasRelatedWork W2048228939 @default.
• W2915060219 hasRelatedWork W2054385866 @default.
• W2915060219 hasRelatedWork W2093995018 @default.
• W2915060219 hasRelatedWork W2115498273 @default.
• W2915060219 hasRelatedWork W2117774390 @default.
• W2915060219 hasRelatedWork W2123087310 @default.
• W2915060219 hasRelatedWork W2124253283 @default.
• W2915060219 hasRelatedWork W2145414447 @default.
• W2915060219 hasRelatedWork W2148303047 @default.
• W2915060219 hasRelatedWork W2157475114 @default.
• W2915060219 hasRelatedWork W2168341111 @default.
• W2915060219 hasRelatedWork W2171382137 @default.

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