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- W2915725058 abstract "A novel actuator toward a low voltage actuation and fast response in RF-MEMS (radio frequency micro-electro-mechanical systems) switches is reported in this paper. The switch is comprised of laterally movable triple electrodes, which are bistable by electrostatic forces applied for not only the on-state, but also the off-state. The bistable triple electrodes enable the implementation of capacitive series and shunt type switches on a single switch, which leads to high isolation in spite of the small gap between the electrodes on the series switch. These features of the actuator are effective for a low voltage and fast response actuation in both the on- and off-state. The structure was designed in RF from a mechanical point of view. The laterally movable electrodes were achieved using a simple, low-cost two-mask process with 2.0 µm thick sputtered aluminum. The characteristics of switching response time and actuation voltage were 5.0 µs and 9.0 V, respectively." @default.
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- W2915725058 date "2019-02-19" @default.
- W2915725058 modified "2023-10-16" @default.
- W2915725058 title "Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches" @default.
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- W2915725058 doi "https://doi.org/10.3390/s19040864" @default.
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