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- W2916230369 abstract "We study thickness-extensional vibration frequencies and modes in a thin ZnO or AlN film on a silicon layer with a circular ring driving electrode. It is shown that the vibration tends to be trappe..." @default.
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- W2916230369 date "2018-09-02" @default.
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- W2916230369 title "Thin film bulk acoustic wave piezoelectric resonators with circular ring driving electrodes for mass sensing" @default.
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- W2916230369 doi "https://doi.org/10.1080/10584587.2018.1521670" @default.
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