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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2917389655> ?p ?o ?g. }

• W2917389655 endingPage "1013" @default.
• W2917389655 startingPage "1012" @default.
• W2917389655 abstract "Structure of ultrathin ferroelectric Hf 0.5 Zr 0.5 O 2 films in composites TiN/Hf 0.5 Zr 0.5 O 2 /Si were investigated by TEM, HRTEM, electron diffraction and X‐ray EDS in a FEI Tecnai Osiris microscope (200 kV X‐FEG field emission gun, 1.2 mm spherical aberration, 1.2 mm chromatic aberration, 0.24 nm resolution at Scherzer defocus and 0.14 nm information limit) and a JEOL ARM 200 F Cold FEG (200 kV, CEOS hexapole type aberration corrector, 0.075 nm resolution at Scherzer defocus and 0.046 nm information limit, ‐2 mm spherical aberration). JEMS [1] simulation of HRTEM images, TED patterns and HRTEM diffractograms were performed for the phase analysis of the nanograins in the Hf 0.5 Zr 0.5 O 2 polycrystalline film. Ultrathin Hf 0.5 Zr 0.5 O 2 films (2.5‐2.7 nm thick) were grown by the Atomic Layer Deposition (ALD) technique on the highly doped n‐type Si (r=0.005 Ohm×cm) substrates and they possess ferroelectric properties [2]. SAED patterns showed that the polycrystalline film contains grains with monoclinic structure (sp.gr. P2 1 /c) and orthorhombic structure (sp.gr. Pbc2 1 ). Ferroelectric behavior was assigned to the presence of the grains with the orthorhombic non‐ centrosymmetric space group Pbc2 1 . HRTEM and HRTEM image simulation was done in order to distinguish monoclinic grains from the orthorhombic non‐centrosymmetric ones and to find possible mutual orientations for better understanding the growth mechanism. The lattice parameters of both phases are very close and the presence of the orthorhombic phase in the mixture can be revealed due to the 111 ring (d 111o =0.296 nm) in the SAED pattern (Fig.1b) which locates between ‐111 and 111monoclinic reflections (d ‐111m = 0.316 nm, d 111m =0.284 nm). High resolution JEOL ARM 200 F Cold FEG microscope with the Cs corrector allowed us to obtain good‐quality HRTEM diffractograms and to find grains with different structures and orientations. In ultrathin Hf 0.5 Zr 0.5 O 2 films, adjacent grains of 15‐25 nm in size (Fig.1c) with monoclinic and orthorhombic structures are overlapped and nevertheless reveal crystallographic relationships. The monoclinic grain has the zone axis close to [‐11 52] which is parallel to the [112] zone axis of the orthorhombic grain (Fig.2) and the monoclinic (13‐2) plane is parallel to the orthorhombic (‐311) plane creating 6.5 % lattice misfit. The overlapped area of about 5 nm wide is between two grains where two crystals of approximately 1.0 – 1.5 nm thick are superimposed. The HRTEM simulation and structure modeling performed for the conditions used showed good agreement with the experimental HRTEM images (Fig.2)." @default.
• W2917389655 created "2019-03-02" @default.
• W2917389655 creator A5006448901 @default.
• W2917389655 creator A5008001134 @default.
• W2917389655 creator A5021461198 @default.
• W2917389655 creator A5046158755 @default.
• W2917389655 creator A5075103559 @default.
• W2917389655 date "2016-12-20" @default.
• W2917389655 modified "2023-10-01" @default.
• W2917389655 title "Nanograins in polycrystalline ferroelectric Hf0.5Zr0.5O2 films on Si substrate" @default.
• W2917389655 cites W2291334276 @default.
• W2917389655 doi "https://doi.org/10.1002/9783527808465.emc2016.5728" @default.
• W2917389655 hasPublicationYear "2016" @default.
• W2917389655 type Work @default.
• W2917389655 sameAs 2917389655 @default.
• W2917389655 citedByCount "0" @default.
• W2917389655 crossrefType "other" @default.
• W2917389655 hasAuthorship W2917389655A5006448901 @default.
• W2917389655 hasAuthorship W2917389655A5008001134 @default.
• W2917389655 hasAuthorship W2917389655A5021461198 @default.
• W2917389655 hasAuthorship W2917389655A5046158755 @default.
• W2917389655 hasAuthorship W2917389655A5075103559 @default.
• W2917389655 hasBestOaLocation W29173896551 @default.
• W2917389655 hasConcept C115624301 @default.
• W2917389655 hasConcept C120665830 @default.
• W2917389655 hasConcept C121332964 @default.
• W2917389655 hasConcept C133386390 @default.
• W2917389655 hasConcept C137637335 @default.
• W2917389655 hasConcept C146088050 @default.
• W2917389655 hasConcept C161368742 @default.
• W2917389655 hasConcept C171250308 @default.
• W2917389655 hasConcept C185592680 @default.
• W2917389655 hasConcept C191897082 @default.
• W2917389655 hasConcept C192562407 @default.
• W2917389655 hasConcept C27461994 @default.
• W2917389655 hasConcept C37243968 @default.
• W2917389655 hasConcept C49040817 @default.
• W2917389655 hasConcept C61276311 @default.
• W2917389655 hasConcept C79090758 @default.
• W2917389655 hasConcept C8010536 @default.
• W2917389655 hasConceptScore W2917389655C115624301 @default.
• W2917389655 hasConceptScore W2917389655C120665830 @default.
• W2917389655 hasConceptScore W2917389655C121332964 @default.
• W2917389655 hasConceptScore W2917389655C133386390 @default.
• W2917389655 hasConceptScore W2917389655C137637335 @default.
• W2917389655 hasConceptScore W2917389655C146088050 @default.
• W2917389655 hasConceptScore W2917389655C161368742 @default.
• W2917389655 hasConceptScore W2917389655C171250308 @default.
• W2917389655 hasConceptScore W2917389655C185592680 @default.
• W2917389655 hasConceptScore W2917389655C191897082 @default.
• W2917389655 hasConceptScore W2917389655C192562407 @default.
• W2917389655 hasConceptScore W2917389655C27461994 @default.
• W2917389655 hasConceptScore W2917389655C37243968 @default.
• W2917389655 hasConceptScore W2917389655C49040817 @default.
• W2917389655 hasConceptScore W2917389655C61276311 @default.
• W2917389655 hasConceptScore W2917389655C79090758 @default.
• W2917389655 hasConceptScore W2917389655C8010536 @default.
• W2917389655 hasLocation W29173896551 @default.
• W2917389655 hasOpenAccess W2917389655 @default.
• W2917389655 hasPrimaryLocation W29173896551 @default.
• W2917389655 hasRelatedWork W1992724909 @default.
• W2917389655 hasRelatedWork W2003923594 @default.
• W2917389655 hasRelatedWork W2005879789 @default.
• W2917389655 hasRelatedWork W2073675457 @default.
• W2917389655 hasRelatedWork W2117583740 @default.
• W2917389655 hasRelatedWork W2375171695 @default.
• W2917389655 hasRelatedWork W2951055198 @default.
• W2917389655 hasRelatedWork W2952470122 @default.
• W2917389655 hasRelatedWork W2952722228 @default.
• W2917389655 hasRelatedWork W2741697029 @default.
• W2917389655 isParatext "false" @default.
• W2917389655 isRetracted "false" @default.
• W2917389655 magId "2917389655" @default.
• W2917389655 workType "other" @default.