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• W2918362456 abstract "We present a defect spectroscopy technique to profile the energy and spatial distribution of defects within a material stack from leakage current (J-V), capacitance (C-V), and conductance (G-V) measurements. The technique relies on the concept of sensitivity maps (SMs) that identify the bandgap regions, where defects affect those electrical characteristics. The information provided by SMs are used to reproduce J-V, C-V, and G-V data measured at different temperatures and frequencies by means of physics-based simulations relying on an accurate description of carrier-defect interactions. The proposed defect spectroscopy technique is applied to ZrO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> -based metal-insulator-metal structures of different compositions for dynamic random-access memory capacitor applications. The origin of the observed voltage, temperature, and frequency dependencies of the I-V, C-V, and G-V data is understood, and the atomic structure of the relevant stack defects is identified." @default.
• W2918362456 created "2019-03-11" @default.
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• W2918362456 date "2019-04-01" @default.
• W2918362456 modified "2023-10-16" @default.
• W2918362456 title "A Sensitivity Map-Based Approach to Profile Defects in MIM Capacitors From <inline-formula> <tex-math notation=LaTeX>${I}$ </tex-math> </inline-formula>–<inline-formula> <tex-math notation=LaTeX>${V}$ </tex-math> </inline-formula>, <inline-formula> <tex-math notation=LaTeX>${C}$ </tex-math> </inline-formula>–<inline-formula> <tex-math notation=LaTeX>${V}$ </tex-math> </inline-formula>, and &…" @default.
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• W2918362456 doi "https://doi.org/10.1109/ted.2019.2900030" @default.
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