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- W2918864401 abstract "A thin-film piezoelectric-on-silicon (TPoS) structured Lame mode resonator is experimentally reported in this work. The resonator is of a ring shape design and fabricated on the in-house AlN-on-SOI (silicon-on-insulator) platform. The thickness of the AlN layer and the device layer of the SOI is $1 mu mathrm{m}$ and $5 mu mathrm{m}$, respectively. Experimental results show that the Lame mode can be excited at 60.6MHz, with loaded Q factors of 3617 in air and 4708 in vacuum, demonstrating great potential for the reported resonator for applications such as timing and inertial measurement." @default.
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- W2918864401 date "2018-12-01" @default.
- W2918864401 modified "2023-09-23" @default.
- W2918864401 title "A Lame Mode Resonator Based on Aluminum Nitride on Silicon Platform" @default.
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- W2918864401 doi "https://doi.org/10.1109/eptc.2018.8654380" @default.
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