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- W2919000199 abstract "We report coexisting surface and bulk gyroscopic effects in the same structure. The surface acoustic wave (SAW) and bulk acoustic wave (BAW) is driven and sensed by interdigital transducer (IDT) on a lithium niobite substrate. The gyroscope is tested on a dither stage which is integrated with a pc board. The stage can apply angular rate as high as 8000 deg/s in air. The IDT drive RF frequency is swept while mechanical dithering the stage. The outputs from both sense ports are demodulated at RF frequency, followed by demodulation at the stage angular dither frequency. The device shows gyroscopic effect when driving not only at the resonance frequency of the SAW, but also at the resonance frequency of BAW modes. The measured scale factor for SAW mode and a bulk mode was 29 nV/(deg/s) and 137 nV/(deg/s), respectively. The peaks in the second demodulation versus frequency occur at spacing of ~7.2 MHz, with Q≈ 30,000. COMSOL simulation predicts bulk mode frequency starts at 3.75 MHz, with spacing of 7.5 MHz. The bulk mode can be suppressed by integrating acoustic absorber to the gyroscope. The bulk waves in the thickness mode are established between the top and bottom of wafer, while the SAW waves are excited by the top and IDT electrodes." @default.
- W2919000199 created "2019-03-11" @default.
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- W2919000199 date "2018-10-01" @default.
- W2919000199 modified "2023-09-28" @default.
- W2919000199 title "Coexisting Surface and Bulk Gyroscopic Effects" @default.
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- W2919000199 doi "https://doi.org/10.1109/ultsym.2018.8579861" @default.
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