Matches in SemOpenAlex for { <https://semopenalex.org/work/W2919567729> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2919567729 abstract "Photoresist coating and patterning are the most repeated process steps in advanced packaging. Spin coating is still the prevalent method of coating planar surfaces and the patterning of thin films. However thick resist processing [1] and spray coating [2] are nowadays well established and commonly used for advanced patterning requirements. Thick resist processing is widely used for plating of interconnects [3] or LIGA fabrication. Spray coating is mainly used to efficiently protect or pattern severe topography and an essential process for packaging, plasma dicing, and MEMS." @default.
- W2919567729 created "2019-03-11" @default.
- W2919567729 creator A5020454435 @default.
- W2919567729 creator A5035970517 @default.
- W2919567729 creator A5039531950 @default.
- W2919567729 creator A5042606063 @default.
- W2919567729 creator A5055527138 @default.
- W2919567729 date "2018-12-01" @default.
- W2919567729 modified "2023-09-27" @default.
- W2919567729 title "Combined Thick Resist Processing and Topography Patterning for Advanced Metal Plating" @default.
- W2919567729 cites W2126115423 @default.
- W2919567729 cites W2154209159 @default.
- W2919567729 doi "https://doi.org/10.1109/eptc.2018.8654312" @default.
- W2919567729 hasPublicationYear "2018" @default.
- W2919567729 type Work @default.
- W2919567729 sameAs 2919567729 @default.
- W2919567729 citedByCount "1" @default.
- W2919567729 countsByYear W29195677292019 @default.
- W2919567729 crossrefType "proceedings-article" @default.
- W2919567729 hasAuthorship W2919567729A5020454435 @default.
- W2919567729 hasAuthorship W2919567729A5035970517 @default.
- W2919567729 hasAuthorship W2919567729A5039531950 @default.
- W2919567729 hasAuthorship W2919567729A5042606063 @default.
- W2919567729 hasAuthorship W2919567729A5055527138 @default.
- W2919567729 hasConcept C100460472 @default.
- W2919567729 hasConcept C115196108 @default.
- W2919567729 hasConcept C127313418 @default.
- W2919567729 hasConcept C134406635 @default.
- W2919567729 hasConcept C136525101 @default.
- W2919567729 hasConcept C142724271 @default.
- W2919567729 hasConcept C145695476 @default.
- W2919567729 hasConcept C160671074 @default.
- W2919567729 hasConcept C165013422 @default.
- W2919567729 hasConcept C171250308 @default.
- W2919567729 hasConcept C192562407 @default.
- W2919567729 hasConcept C204787440 @default.
- W2919567729 hasConcept C2776985018 @default.
- W2919567729 hasConcept C2779227376 @default.
- W2919567729 hasConcept C2781448156 @default.
- W2919567729 hasConcept C37977207 @default.
- W2919567729 hasConcept C51807945 @default.
- W2919567729 hasConcept C53524968 @default.
- W2919567729 hasConcept C71924100 @default.
- W2919567729 hasConcept C8058405 @default.
- W2919567729 hasConceptScore W2919567729C100460472 @default.
- W2919567729 hasConceptScore W2919567729C115196108 @default.
- W2919567729 hasConceptScore W2919567729C127313418 @default.
- W2919567729 hasConceptScore W2919567729C134406635 @default.
- W2919567729 hasConceptScore W2919567729C136525101 @default.
- W2919567729 hasConceptScore W2919567729C142724271 @default.
- W2919567729 hasConceptScore W2919567729C145695476 @default.
- W2919567729 hasConceptScore W2919567729C160671074 @default.
- W2919567729 hasConceptScore W2919567729C165013422 @default.
- W2919567729 hasConceptScore W2919567729C171250308 @default.
- W2919567729 hasConceptScore W2919567729C192562407 @default.
- W2919567729 hasConceptScore W2919567729C204787440 @default.
- W2919567729 hasConceptScore W2919567729C2776985018 @default.
- W2919567729 hasConceptScore W2919567729C2779227376 @default.
- W2919567729 hasConceptScore W2919567729C2781448156 @default.
- W2919567729 hasConceptScore W2919567729C37977207 @default.
- W2919567729 hasConceptScore W2919567729C51807945 @default.
- W2919567729 hasConceptScore W2919567729C53524968 @default.
- W2919567729 hasConceptScore W2919567729C71924100 @default.
- W2919567729 hasConceptScore W2919567729C8058405 @default.
- W2919567729 hasLocation W29195677291 @default.
- W2919567729 hasOpenAccess W2919567729 @default.
- W2919567729 hasPrimaryLocation W29195677291 @default.
- W2919567729 hasRelatedWork W1990522956 @default.
- W2919567729 hasRelatedWork W2061398994 @default.
- W2919567729 hasRelatedWork W2084713926 @default.
- W2919567729 hasRelatedWork W2093764712 @default.
- W2919567729 hasRelatedWork W2126115423 @default.
- W2919567729 hasRelatedWork W2165310448 @default.
- W2919567729 hasRelatedWork W2379221362 @default.
- W2919567729 hasRelatedWork W2549488361 @default.
- W2919567729 hasRelatedWork W2919567729 @default.
- W2919567729 hasRelatedWork W315017491 @default.
- W2919567729 isParatext "false" @default.
- W2919567729 isRetracted "false" @default.
- W2919567729 magId "2919567729" @default.
- W2919567729 workType "article" @default.