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- W2919829203 abstract "Even if metallic contamination on a silicon wafer is extremely low, it affects quality of semiconductor devices. High sensitivity analytical technique has been required to control such trace level of metallic contamination. A new tool that is combination of the latest model ICP-MS and vapor phase decomposition euqipment demonstrated about 10 to 100 times better detection limit, e.g. 1E5 to 1E6 atoms/cm2, compared with the conventional techniques." @default.
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- W2919829203 date "2018-12-01" @default.
- W2919829203 modified "2023-10-16" @default.
- W2919829203 title "Development of extreme microanalysis technology for metallic impurity on a silicon wafer surface" @default.
- W2919829203 doi "https://doi.org/10.1109/issm.2018.8651161" @default.
- W2919829203 hasPublicationYear "2018" @default.
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