Matches in SemOpenAlex for { <https://semopenalex.org/work/W2920243311> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2920243311 abstract "The mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of low-pressure chemical vapour deposited silicon nitride thin films. Doubly-clamped membranes of silicon nitride with thickness less than 50 nm and length varying from 5 um to 60 um were fabricated. The elastic modulus and stress of the suspended membranes were measured using Atomic Force Microscope (AFM) based nanomechanical spectroscopy. The elastic modulus of the suspended membranes was found to be significantly higher than that of corresponding thin films on the substrate. A reduction in the net stress after the fabrication of membrane was observed and is explained by estimating the contributions of thermal stress and intrinsic stress. We establish a mathematical model to calculate the normalized elastic modulus of a membrane. Furthermore, we observe that the stress in a membrane changes with its length. We also develop an experimental model for the SiNx membrane-Si substrate capillary force-gradient that could collapse the membrane." @default.
- W2920243311 created "2019-03-11" @default.
- W2920243311 creator A5068953025 @default.
- W2920243311 creator A5084735054 @default.
- W2920243311 creator A5090032607 @default.
- W2920243311 date "2019-03-06" @default.
- W2920243311 modified "2023-09-27" @default.
- W2920243311 title "Nanomechanical Spectroscopy of Ultrathin Silicon Nitride Membranes" @default.
- W2920243311 hasPublicationYear "2019" @default.
- W2920243311 type Work @default.
- W2920243311 sameAs 2920243311 @default.
- W2920243311 citedByCount "0" @default.
- W2920243311 crossrefType "posted-content" @default.
- W2920243311 hasAuthorship W2920243311A5068953025 @default.
- W2920243311 hasAuthorship W2920243311A5084735054 @default.
- W2920243311 hasAuthorship W2920243311A5090032607 @default.
- W2920243311 hasConcept C102951782 @default.
- W2920243311 hasConcept C111368507 @default.
- W2920243311 hasConcept C119473381 @default.
- W2920243311 hasConcept C127313418 @default.
- W2920243311 hasConcept C133267278 @default.
- W2920243311 hasConcept C138885662 @default.
- W2920243311 hasConcept C15083742 @default.
- W2920243311 hasConcept C155672457 @default.
- W2920243311 hasConcept C159985019 @default.
- W2920243311 hasConcept C171250308 @default.
- W2920243311 hasConcept C173409883 @default.
- W2920243311 hasConcept C185592680 @default.
- W2920243311 hasConcept C19067145 @default.
- W2920243311 hasConcept C192562407 @default.
- W2920243311 hasConcept C194760766 @default.
- W2920243311 hasConcept C21036866 @default.
- W2920243311 hasConcept C2777289219 @default.
- W2920243311 hasConcept C2777431650 @default.
- W2920243311 hasConcept C2779227376 @default.
- W2920243311 hasConcept C41625074 @default.
- W2920243311 hasConcept C41895202 @default.
- W2920243311 hasConcept C43486711 @default.
- W2920243311 hasConcept C49040817 @default.
- W2920243311 hasConcept C49326732 @default.
- W2920243311 hasConcept C544956773 @default.
- W2920243311 hasConcept C55493867 @default.
- W2920243311 hasConceptScore W2920243311C102951782 @default.
- W2920243311 hasConceptScore W2920243311C111368507 @default.
- W2920243311 hasConceptScore W2920243311C119473381 @default.
- W2920243311 hasConceptScore W2920243311C127313418 @default.
- W2920243311 hasConceptScore W2920243311C133267278 @default.
- W2920243311 hasConceptScore W2920243311C138885662 @default.
- W2920243311 hasConceptScore W2920243311C15083742 @default.
- W2920243311 hasConceptScore W2920243311C155672457 @default.
- W2920243311 hasConceptScore W2920243311C159985019 @default.
- W2920243311 hasConceptScore W2920243311C171250308 @default.
- W2920243311 hasConceptScore W2920243311C173409883 @default.
- W2920243311 hasConceptScore W2920243311C185592680 @default.
- W2920243311 hasConceptScore W2920243311C19067145 @default.
- W2920243311 hasConceptScore W2920243311C192562407 @default.
- W2920243311 hasConceptScore W2920243311C194760766 @default.
- W2920243311 hasConceptScore W2920243311C21036866 @default.
- W2920243311 hasConceptScore W2920243311C2777289219 @default.
- W2920243311 hasConceptScore W2920243311C2777431650 @default.
- W2920243311 hasConceptScore W2920243311C2779227376 @default.
- W2920243311 hasConceptScore W2920243311C41625074 @default.
- W2920243311 hasConceptScore W2920243311C41895202 @default.
- W2920243311 hasConceptScore W2920243311C43486711 @default.
- W2920243311 hasConceptScore W2920243311C49040817 @default.
- W2920243311 hasConceptScore W2920243311C49326732 @default.
- W2920243311 hasConceptScore W2920243311C544956773 @default.
- W2920243311 hasConceptScore W2920243311C55493867 @default.
- W2920243311 hasLocation W29202433111 @default.
- W2920243311 hasOpenAccess W2920243311 @default.
- W2920243311 hasPrimaryLocation W29202433111 @default.
- W2920243311 hasRelatedWork W1893229066 @default.
- W2920243311 hasRelatedWork W1970946020 @default.
- W2920243311 hasRelatedWork W1982340369 @default.
- W2920243311 hasRelatedWork W2008910722 @default.
- W2920243311 hasRelatedWork W2020804587 @default.
- W2920243311 hasRelatedWork W2033772361 @default.
- W2920243311 hasRelatedWork W2039473749 @default.
- W2920243311 hasRelatedWork W2100149508 @default.
- W2920243311 hasRelatedWork W2109833639 @default.
- W2920243311 hasRelatedWork W2120540974 @default.
- W2920243311 hasRelatedWork W2146490890 @default.
- W2920243311 hasRelatedWork W2152832683 @default.
- W2920243311 hasRelatedWork W2171510121 @default.
- W2920243311 hasRelatedWork W2268740346 @default.
- W2920243311 hasRelatedWork W2315861630 @default.
- W2920243311 hasRelatedWork W2354541067 @default.
- W2920243311 hasRelatedWork W2461416257 @default.
- W2920243311 hasRelatedWork W2956141531 @default.
- W2920243311 hasRelatedWork W3119949741 @default.
- W2920243311 hasRelatedWork W2064644302 @default.
- W2920243311 isParatext "false" @default.
- W2920243311 isRetracted "false" @default.
- W2920243311 magId "2920243311" @default.
- W2920243311 workType "article" @default.