Matches in SemOpenAlex for { <https://semopenalex.org/work/W2921134319> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2921134319 abstract "As electronic packaging is becoming thinner and lighter, it is necessary to address the grinding process issues in the silicon wafer. In this context, the self-rotating grinding method is usually employed to mitigate the backside grinding in thin wafers, due to its high effectiveness. However, as the residual stress cannot be completely eliminated from the grinding process, it will cause warpage and lead to die damage. This phenomenon has been investigated by applying the finite element method (FEM) when modeling the grinding process. In the present investigation, a simulation model of the grinding process was developed for analyzing the warpage process and the residual stress. To validate the simulation model, experimental testing was conducted, whereby Scanning Electron Microscope (SEM) was used to observe the wafer depth, and crystal lattice breakage was observed through Raman Analyzer. The experimental data were used to validate the simulation model of the grinding process, which was subsequently applied to analyze the warpage and the residual stress in the wafer grinding." @default.
- W2921134319 created "2019-03-22" @default.
- W2921134319 creator A5054204177 @default.
- W2921134319 creator A5085178624 @default.
- W2921134319 date "2018-12-01" @default.
- W2921134319 modified "2023-09-24" @default.
- W2921134319 title "Numerical Approach to Predict Silicon Wafer Grinding Warpage" @default.
- W2921134319 cites W1979052855 @default.
- W2921134319 cites W1989548400 @default.
- W2921134319 cites W1997023623 @default.
- W2921134319 cites W2071720910 @default.
- W2921134319 cites W2111738570 @default.
- W2921134319 cites W2141599190 @default.
- W2921134319 cites W2478919523 @default.
- W2921134319 doi "https://doi.org/10.1109/emap.2018.8660847" @default.
- W2921134319 hasPublicationYear "2018" @default.
- W2921134319 type Work @default.
- W2921134319 sameAs 2921134319 @default.
- W2921134319 citedByCount "1" @default.
- W2921134319 countsByYear W29211343192020 @default.
- W2921134319 crossrefType "proceedings-article" @default.
- W2921134319 hasAuthorship W2921134319A5054204177 @default.
- W2921134319 hasAuthorship W2921134319A5085178624 @default.
- W2921134319 hasConcept C127413603 @default.
- W2921134319 hasConcept C135628077 @default.
- W2921134319 hasConcept C151730666 @default.
- W2921134319 hasConcept C159985019 @default.
- W2921134319 hasConcept C160671074 @default.
- W2921134319 hasConcept C192562407 @default.
- W2921134319 hasConcept C199639397 @default.
- W2921134319 hasConcept C26771246 @default.
- W2921134319 hasConcept C2777571299 @default.
- W2921134319 hasConcept C2779015675 @default.
- W2921134319 hasConcept C2779343474 @default.
- W2921134319 hasConcept C37292000 @default.
- W2921134319 hasConcept C49040817 @default.
- W2921134319 hasConcept C66938386 @default.
- W2921134319 hasConcept C78519656 @default.
- W2921134319 hasConcept C86803240 @default.
- W2921134319 hasConceptScore W2921134319C127413603 @default.
- W2921134319 hasConceptScore W2921134319C135628077 @default.
- W2921134319 hasConceptScore W2921134319C151730666 @default.
- W2921134319 hasConceptScore W2921134319C159985019 @default.
- W2921134319 hasConceptScore W2921134319C160671074 @default.
- W2921134319 hasConceptScore W2921134319C192562407 @default.
- W2921134319 hasConceptScore W2921134319C199639397 @default.
- W2921134319 hasConceptScore W2921134319C26771246 @default.
- W2921134319 hasConceptScore W2921134319C2777571299 @default.
- W2921134319 hasConceptScore W2921134319C2779015675 @default.
- W2921134319 hasConceptScore W2921134319C2779343474 @default.
- W2921134319 hasConceptScore W2921134319C37292000 @default.
- W2921134319 hasConceptScore W2921134319C49040817 @default.
- W2921134319 hasConceptScore W2921134319C66938386 @default.
- W2921134319 hasConceptScore W2921134319C78519656 @default.
- W2921134319 hasConceptScore W2921134319C86803240 @default.
- W2921134319 hasLocation W29211343191 @default.
- W2921134319 hasOpenAccess W2921134319 @default.
- W2921134319 hasPrimaryLocation W29211343191 @default.
- W2921134319 hasRelatedWork W1512319868 @default.
- W2921134319 hasRelatedWork W2004362670 @default.
- W2921134319 hasRelatedWork W2110784035 @default.
- W2921134319 hasRelatedWork W2123679440 @default.
- W2921134319 hasRelatedWork W2196605515 @default.
- W2921134319 hasRelatedWork W2351696714 @default.
- W2921134319 hasRelatedWork W2387616028 @default.
- W2921134319 hasRelatedWork W2921134319 @default.
- W2921134319 hasRelatedWork W3200213781 @default.
- W2921134319 hasRelatedWork W4245667518 @default.
- W2921134319 isParatext "false" @default.
- W2921134319 isRetracted "false" @default.
- W2921134319 magId "2921134319" @default.
- W2921134319 workType "article" @default.